公开(公告)号：DE112004000058T5

公开(公告)日：2005-09-01

申请号：DE112004000058

申请日：2004-08-20

Applicant: POSTECH FOUNDATION POHANG

Inventor： REE MOONHOR ,  OH WEONTAE ,  HWANG YONG TAEK ,  LEE BYEONGDU

IPC: C08G65/32 ,  C08G77/42 ,  C08L83/10 ,  H01L21/312 ,  H01L21/31 ,  H01L23/58

Abstract: Provided are a porous organosilicate polymer composite prepared by heating an organic/inorganic hybrid polymer in which an organosilicate polymer is chemically bonded to a radial pore-forming polymer ended with a hydrolyzable alkoxysilyl group and used as a core molecule, and a semiconductor device using an organosilicate polymer composite film including the porous organosilicate polymer composite. The organosilicate polymer composite film has a very low dielectric constant, and thus, is useful as a dielectric film of the semiconductor device.

公开(公告)号：DE112004001135T5

公开(公告)日：2006-05-24

申请号：DE112004001135

申请日：2004-02-17

Applicant: POSTECH FOUNDATION POHANG

Inventor： REE MOONHOR ,  OH WEONTAE ,  HWANG YONGTAEK ,  LEE BYEONGDU

IPC: C08F283/00 ,  C08F283/06 ,  C08F283/12 ,  C08G65/336 ,  C08G77/48 ,  C09D183/04

Abstract: A star-shaped polymer having an alkoxy silane end group and containing an ether group at the center thereof, which is represented by formula (I), is useful as a pore introducer to obtain a low dielectric silicate polymer film having nano-pores distributed regularly and evenly. The star-shaped polymer is prepared by comprising conducting a ring open polymerization of a cyclic monomer and a polyhydric alcohol, and reacting the resulting polymer with an alkoxy silane compound.