公开(公告)号：AU2644095A

公开(公告)日：1996-03-22

申请号：AU2644095

申请日：1995-05-22

Applicant: PRESSCO TECH INC

Inventor： GRAVES TERRY L ,  FEIN HOWARD

IPC: G01B11/30 ,  G01N21/84 ,  G01N21/88 ,  G01N21/90 ,  G01B11/00 ,  G01N21/00

公开(公告)号：AU6090994A

公开(公告)日：1994-08-29

申请号：AU6090994

申请日：1994-01-26

Applicant: PRESSCO TECH INC

Inventor： FEIN HOWARD ,  GRAVES TERRY L

IPC: G01N21/88 ,  G01N21/86 ,  G01N21/90

公开(公告)号：EP0777850A4

公开(公告)日：1999-02-03

申请号：EP95921336

申请日：1995-05-22

Applicant: PRESSCO TECH INC

Inventor： GRAVES TERRY L ,  FEIN HOWARD

IPC: G01B11/30 ,  G01N21/84 ,  G01N21/88 ,  G01N21/90 ,  G01B11/00 ,  G01N21/00

CPC classification number: G01N21/8806 ,  G01N21/90

Abstract: A system for illumination of discrete specimens in an optical inspection system (A) include an image acquisition system (C) and corresponding illumination system (B). A beam splitter (16) intercepts light from a light source (10) and communicates a portion of it to field lens (20). A field lens (20), in turn, communicates light to a specimen (24) disposed in a viewing area (22). Light reflected from the specimen (24) is communicated back through the field lenses (20), through the beam splitter (16) and ultimately to a video camera (34) from which a digitized image is obtained. In another embodiment, light reflected from the specimen (24) and propagated through the beam splitter (16) has communicated to a second beam splitter (30). Separated light therefrom is communicated to first and second video cameras (34, 36), thus allowing for imaging of separate portions of the specimen (24).

Abstract translation: 在光学检查系统（A）中用于照射离散样本的系统包括图像采集系统（C）和相应的照明系统（B）。 分束器（16）拦截来自光源（10）的光，并将其一部分传送到场透镜（20）。 场透镜（20）又将光传送到设置在观看区域（22）中的样本（24）。 从样本（24）反射的光通过场透镜（20）通过分束器（16）传送回并最终传送到从其获得数字化图像的摄像机（34）。 在另一个实施例中，从样本（24）反射并通过分束器（16）传播的光已经传送到第二分束器（30）。 分离的光被传送到第一和第二摄像机（34,36），从而允许对样本（24）的分开的部分进行成像。