公开(公告)号：WO1994018548A1

公开(公告)日：1994-08-18

申请号：PCT/US1994000668

申请日：1994-01-26

Applicant: PRESSCO TECHNOLOGY, INC.

Inventor： PRESSCO TECHNOLOGY, INC. ,  FEIN, Howard ,  GRAVES, Terry, L.

IPC: G01N21/86

CPC classification number: G01N21/8806 ,  G01N21/90

Abstract: A substantially isotropic illumination source (B) utilizes a generally spherical, translucent diffuser (26). The spherical diffuser has an inner wall and a diffusive outer wall. Light is communicated inwardly to the sphere along a first hemisphere. Light is diffused and homogenized by internal reflection within the sphere and communicated outwardly through a complementary hemisphere. This light, upon being diffused by the external or outer wall is substantially isotropic. The isotropic light so generated is utilized for video inspection of translucent specimens (10) with improved contrast to facilitate detection (14) of flaws therein. Another aspect utilizes a specimen itself as the isotropic diffuser.

Abstract translation: 基本上各向同性的照明源（B）利用大致球形的透光扩散器（26）。 球形扩散器具有内壁和漫射外壁。 光沿第一半球向内传播到球体。 光通过球内的内部反射而扩散和均匀化，并通过补充半球向外传播。 该光在被外壁或外壁扩散时基本上是各向同性的。 所产生的各向同性的光被用于具有改善的对比度的半透明样品（10）的视频检查，以便于检测（14）其中的缺陷。 另一方面利用样本本身作为各向同性扩散器。

公开(公告)号：WO1996007076A1

公开(公告)日：1996-03-07

申请号：PCT/US1995006435

申请日：1995-05-22

Applicant: PRESSCO TECHNOLOGY, INC.

Inventor： PRESSCO TECHNOLOGY, INC. ,  GRAVES, Terry, L. ,  FEIN, Howard

IPC: G01B11/00

CPC classification number: G01N21/8806 ,  G01N21/90

Abstract: A system for illumination of discrete specimens in an optical inspection system (A) include an image acquisition system (C) and corresponding illumination system (B). A beam splitter (16) intercepts light from a light source (10) and communicates a portion of it to field lens (20). A field lens (20), in turn, communicates light to a specimen (24) disposed in a viewing area (22). Light reflected from the specimen (24) is communicated back through the field lenses (20), through the beam splitter (16) and ultimately to a video camera (34) from which a digitized image is obtained. In another embodiment, light reflected from the specimen (24) and propagated through the beam splitter (16) has communicated to a second beam splitter (30). Separated light therefrom is communicated to first and second video cameras (34, 36), thus allowing for imaging of separate portions of the specimen (24).

Abstract translation: 在光学检查系统（A）中用于照射离散样本的系统包括图像采集系统（C）和相应的照明系统（B）。 分束器（16）拦截来自光源（10）的光，并将其一部分传送到场透镜（20）。 场透镜（20）又将光传送到设置在观看区域（22）中的样本（24）。 从样本（24）反射的光通过场透镜（20）通过分束器（16）传送回并最终传送到从其获得数字化图像的摄像机（34）。 在另一个实施例中，从样本（24）反射并通过分束器（16）传播的光已经传送到第二分束器（30）。 分离的光被传送到第一和第二摄像机（34,36），从而允许对样本（24）的分开的部分进行成像。

公开(公告)号：EP0777850A1

公开(公告)日：1997-06-11

申请号：EP95921336.0

申请日：1995-05-22

Applicant: PRESSCO TECHNOLOGY INC.

Inventor： GRAVES, Terry, L. ,  FEIN, Howard

IPC: G01B11 ,  G01N21

CPC classification number: G01N21/8806 ,  G01N21/90

Abstract: A system for illumination of discrete specimens in an optical inspection system (A) include an image acquisition system (C) and corresponding illumination system (B). A beam splitter (16) intercepts light from a light source (10) and communicates a portion of it to field lens (20). A field lens (20), in turn, communicates light to a specimen (24) disposed in a viewing area (22). Light reflected from the specimen (24) is communicated back through the field lenses (20), through the beam splitter (16) and ultimately to a video camera (34) from which a digitized image is obtained. In another embodiment, light reflected from the specimen (24) and propagated through the beam splitter (16) has communicated to a second beam splitter (30). Separated light therefrom is communicated to first and second video cameras (34, 36), thus allowing for imaging of separate portions of the specimen (24).