公开(公告)号：US20060262435A1

公开(公告)日：2006-11-23

申请号：US11132783

申请日：2005-05-19

Applicant: Paul Denham

Inventor： Paul Denham

IPC: G02B7/182

CPC classification number: G02B7/1821 ,  G02B5/0891 ,  G02B26/101 ,  G03F7/70058 ,  G03F7/701 ,  G03F7/702 ,  G03F7/70825 ,  G03F7/70841 ,  G21K2201/06

Abstract: A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.

Abstract translation: 具有高效率反射涂层的紧凑且真空兼容的电磁线圈驱动可倾斜平台可用作EUV应用中的扫描仪。 扫描仪的驱动电子设备完全可原地编程并可快速切换。