Method of fabricating capillary discharge plasma display panel using combination of laser and wet etchings
    1.
    发明申请
    Method of fabricating capillary discharge plasma display panel using combination of laser and wet etchings 审中-公开
    使用激光和湿蚀刻的组合制造毛细管放电等离子体显示面板的方法

    公开(公告)号:US20020127942A1

    公开(公告)日:2002-09-12

    申请号:US09976276

    申请日:2001-10-15

    CPC classification number: H01J9/241

    Abstract: A method of fabricating a plasma display panel having a substrate includes the steps of forming an electrode on the substrate, forming a dielectric layer on the substrate including the electrode, forming at least one capillary in the dielectric layer using dry-etching, wherein the capillary and the electrode are separated apart by a portion of the dielectric layer, and sequentially removing the portion of dielectric layer to expose the electrode through the capillary.

    Abstract translation: 一种制造具有衬底的等离子体显示面板的方法包括以下步骤:在衬底上形成电极,在包括电极的衬底上形成电介质层,使用干蚀刻在电介质层中形成至少一个毛细管,其中毛细管 并且电极被电介质层的一部分分开,并且依次去除电介质层的部分以通过毛细管露出电极。

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