Abstract:
The present invention provides a structure combining an IC integrated substrate (30) and a carrier (21), which comprises a carrier (21) and an IC integrated substrate (30) formed on the carrier. The interface between the IC integrated substrate and the carrier has a specific area (23) at which the interface adhesion is different from that at the remaining area of the interface. The present invention also provides a method of manufacturing the above structure and a method of manufacturing electronic devices using the above structure.
Abstract:
The present invention provides a structure (28) combining an IC integrated substrate (8) and a carrier (10), which comprises a carrier and an IC integrated substrate formed on the carrier. The IC integrated substrate has a first dielectric layer (14) attached to the carrier. The materials of the carrier and the first dielectric layer are selected to prevent the IC integrated substrate from peeling off the carrier during processing and to allow the IC integrated substrate to naturally separate from the carrier after being cut, through the adhesion between the carrier and the first dielectric layer. The present invention also provides a method of manufacturing the above structure and a method of manufacturing electrical devices (6) using the above structure. In one embodiment the IC integrated substrate comprises dielectric layers (14,16,18,20) with the metal layers (22,24,26) therebetween. In another embodiment the IC integrated substrate includes at least one semiconductor device (35).
Abstract:
The present invention provides a structure combining an IC integrated substrate (30) and a carrier (21), which comprises a carrier (21) and an IC integrated substrate (30) formed on the carrier. The interface between the IC integrated substrate and the carrier has a specific area (23) at which the interface adhesion is different from that at the remaining area of the interface. The present invention also provides a method of manufacturing the above structure and a method of manufacturing electronic devices using the above structure.
Abstract:
The invention provides a temporary substrate (11) with multi-layer interconnection structure (19). The multi-layer interconnection structure (19) is adhered to the temporary substrate (11) in partial areas (20). The invention also provides a method of recycling such a temporary substrate and a method of packaging electronic devices by using such temporary substrate. The invention also provides a method of manufacturing multi-layer interconnection devices (19).
Abstract:
The present invention provides a structure (28) combining an IC integrated substrate (8) and a carrier (10), which comprises a carrier and an IC integrated substrate formed on the carrier. The IC integrated substrate has a first dielectric layer (14) attached to the carrier. The materials of the carrier and the first dielectric layer are selected to prevent the IC integrated substrate from peeling off the carrier during processing and to allow the IC integrated substrate to naturally separate from the carrier after being cut, through the adhesion between the carrier and the first dielectric layer. The present invention also provides a method of manufacturing the above structure and a method of manufacturing electrical devices (6) using the above structure. In one embodiment the IC integrated substrate comprises dielectric layers (14,16,18,20) with the metal layers (22,24,26) therebetween. In another embodiment the IC integrated substrate includes at least one semiconductor device (35).
Abstract:
The invention provides a temporary substrate (11) with multi-layer interconnection structure (19). The multi-layer interconnection structure (19) is adhered to the temporary substrate (11) in partial areas (20). The invention also provides a method of recycling such a temporary substrate and a method of packaging electronic devices by using such temporary substrate. The invention also provides a method of manufacturing multi-layer interconnection devices (19).