NONUNIFORM CORRUGATED DIAPHRAGM FOR MEMS TUNERS AND ACTUATORS
    1.
    发明申请
    NONUNIFORM CORRUGATED DIAPHRAGM FOR MEMS TUNERS AND ACTUATORS 有权
    用于MEMS调谐器和执行器的非谐振式压电膜

    公开(公告)号:US20160336922A1

    公开(公告)日:2016-11-17

    申请号:US15098969

    申请日:2016-04-14

    Abstract: A cavity resonator tuning diaphragm comprising a plurality of inner corrugations, the plurality of inner corrugations having a first depth. An outer corrugation located between the plurality of inner corrugations and a perimeter of the diaphragm is also included, the outer corrugation having a second depth greater than the first depth. The addition of the outer deep corrugation provides increased thermal stability and reduced required actuation voltage.

    Abstract translation: 一种空腔谐振器调谐膜,包括多个内部波纹,所述多个内部波纹具有第一深度。 还包括位于多个内部波纹之间的外部波纹和隔膜的周边,外部波纹具有大于第一深度的第二深度。 外部深波纹的添加提供了增加的热稳定性并降低了所需的致动电压。

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