公开(公告)号：CA2950919A1

公开(公告)日：2016-01-14

申请号：CA2950919

申请日：2015-06-08

Applicant: QUALCOMM INC

Inventor： LASITER JON BRADLEY ,  SHENOY RAVINDRA VAMAN ,  GOUSEV EVGENI PETROVICH ,  PANCHAWAGH HRISHIKESH ,  BURNS DAVID WILLIAM ,  KUO NAI-KUEI ,  GRIFFITHS JONATHAN CHARLES ,  GANTI SURYAPRAKASH

IPC: B06B1/06 ,  B81B3/00 ,  G06F3/043 ,  H01L41/09

Abstract: A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a multilayer stack disposed on a substrate. The multilayer stack may include an anchor structure disposed over the substrate, a piezoelectric layer stack disposed over the anchor structure, and a mechanical layer disposed proximate to the piezoelectric layer stack. The piezoelectric layer stack may be disposed over a cavity. The mechanical layer may seal the cavity and, together with the piezoelectric layer stack, is supported by the anchor structure and forms a membrane over the cavity, the membrane being configured to undergo one or both of flexural motion and vibration when the PMUT receives or transmits ultrasonic signals.