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    Method and system for packaging mems device
    3.
    发明专利
    Method and system for packaging mems device 审中-公开
    用于封装MEMS器件的方法和系统

    公开(公告)号：JP2013080235A

    公开(公告)日：2013-05-02

    申请号：JP2012256422

    申请日：2012-11-22

    Applicant: Qualcomm Mems Technologies Inc ,  クゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc.

    Inventor： MILES MARK W ,  SAMPSELL JEFFREY B ,  PALMATEER LAUREN ,  ARBUCKLE BRIAN W ,  FLOYD PHILIP D

    IPC: G02B26/06 ,  B81B7/02

    CPC classification number: B81C1/0023 ,  G02B26/001 ,  Y10T29/49002

    Abstract: PROBLEM TO BE SOLVED: To provide an array of interferometric modulators comprising a backplate to protect an interferometric modulator from mechanical interference, excessive moisture, and other potentially damaging substances.SOLUTION: In a MEMS-based display device 600, an array 604 of interferometric modulators is configured to reflect light through a transparent substrate. The transparent substrate is attached with a seal 606 to a backplate 608 and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can become physical support for device components, such as electronic components, which can be used to control states of a display. The backplate can also be utilized as a primary structural support for the device.

    Abstract translation: 要解决的问题：提供一种包括背板的干涉式调制器阵列，以保护干涉式调制器不受机械干扰，过度水分和其它潜在的有害物质的影响。 解决方案：在基于MEMS的显示装置600中，干涉式调制器的阵列604被配置为将光反射通过透明基板。 透明基板用密封件606附接到背板608，并且背板可以包含用于控制干涉式调制器阵列的电子电路。 背板可以成为可用于控制显示器状态的设备组件（例如电子组件）的物理支持。 背板也可以用作设备的主要结构支撑。 版权所有（C）2013，JPO＆INPIT

    Mems device having support structure and method of fabricating the same
    5.
    发明专利
    Mems device having support structure and method of fabricating the same 有权
    具有支持结构的MEMS装置及其制造方法

    公开(公告)号：JP2012030362A

    公开(公告)日：2012-02-16

    申请号：JP2011237032

    申请日：2011-10-28

    Applicant: Qualcomm Mems Technologies Inc ,  クォルコム・メムズ・テクノロジーズ・インコーポレーテッド

    Inventor： CHUI CLARENCE ,  CHUN WON SUK ,  GANTI SURYA PRAKASH ,  KOTHARI MANISH ,  MILES MARK W ,  SAMPSELL JEFFREY B ,  SASAGAWA TERUO

    IPC: B81C1/00 ,  B81B3/00 ,  G02B26/06

    CPC classification number: G02B26/001 ,  B81B3/007 ,  B81B2201/047 ,  B81B2203/0307 ,  B81B2203/053

    Abstract: PROBLEM TO BE SOLVED: To provide a MEMS device having a support structure and a method of fabricating the same.SOLUTION: Embodiments of MEMS devices includes a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

    Abstract translation: 要解决的问题：提供一种具有支撑结构的MEMS器件及其制造方法。 解决方案：MEMS器件的实施例包括通过间隙与导电固定层间隔开的导电可移动层，并且由导电可移动层中的上凹部的刚性支撑结构或铆钉支撑，或通过凹陷中的柱支撑 导电可移动层。 在某些实施例中，铆钉结构的部分延伸穿过可移动层并接触下面的层。 在其他实施例中，用于形成刚性支撑结构的材料也可以用于钝化与MEMS装置电连接的其它暴露的电引线，保护电引线免受损坏或其他干扰。 版权所有（C）2012，JPO＆INPIT

    Interference modulator and method of controlling array thereof
    6.
    发明专利
    Interference modulator and method of controlling array thereof 审中-公开
    干扰调制器及其控制方法

    公开(公告)号：JP2012123398A

    公开(公告)日：2012-06-28

    申请号：JP2012009433

    申请日：2012-01-19

    Applicant: Qualcomm Mems Technologies Inc ,  クアルコム メムス テクノロジーズ インコーポレイテッド

    Inventor： MILES MARK W

    IPC: G02B26/08 ,  B81B3/00 ,  G02B5/28

    Abstract: PROBLEM TO BE SOLVED: To provide an interference modulator and a method of controlling an array of the interference modulator to realize a color system having excellent flexibility with modulation of incident light by manipulating optical properties of a micromechanical device.SOLUTION: The interference modulator includes a plurality of interference modulators. At least one of the interference modulators emits colored light, and at least one of the interference modulators emits white light.

    Abstract translation: 要解决的问题：提供一种干扰调制器和控制干扰调制器的阵列的方法，以通过控制微机械装置的光学特性来实现具有优异灵活性的调制入射光的彩色系统。 解决方案：干扰调制器包括多个干扰调制器。 至少一个干涉调制器发出有色光，并且至少一个干涉调制器发出白光。 版权所有（C）2012，JPO＆INPIT

    Optical device and method for manufacturing the same
    7.
    发明专利
    Optical device and method for manufacturing the same 有权
    光学装置及其制造方法

    公开(公告)号：JP2012078870A

    公开(公告)日：2012-04-19

    申请号：JP2012002449

    申请日：2012-01-10

    Applicant: Qualcomm Mems Technologies Inc ,  クアルコム メムス テクノロジーズ インコーポレイテッド

    Inventor： MILES MARK W

    IPC: G02B26/02 ,  G02B26/08 ,  B81B3/00 ,  B81C1/00 ,  G02B26/00 ,  G02F1/00 ,  G03F7/00

    CPC classification number: G02B26/001 ,  G02B5/003 ,  G02B5/288 ,  G02B26/02 ,  G02B27/0018 ,  G03F7/0007

    Abstract: PROBLEM TO BE SOLVED: To create a light absorption inactive area of an IMOD with an optical device covered or in the optical device by reducing the influence of reflection ambient rays of light from a certain specific inactive area of the IMOD in order to improve a desired optical response since it is necessary to create the inactive area of the IMOD with light absorption.SOLUTION: Disclosed is an optical device including: a substrate; a static optical component formed on the substrate such that the rays of light are absorbed with a film stack included; and a dynamic optical component on the substrate, and a method of manufacturing the optical device.

    Abstract translation: 要解决的问题：通过减少来自IMOD的某个特定无效区域的反射环境光线的影响，通过覆盖的光学装置或在光学装置中创建IMOD的光吸收无效区域，以便 改善所需的光学响应，因为需要用光吸收来创建IMOD的无效区域。 解决方案：公开了一种光学装置，包括：基板; 形成在所述基板上的静电光学部件，使得所述光线被所述薄膜堆叠吸收; 以及基板上的动态光学部件，以及制造该光学器件的方法。 版权所有（C）2012，JPO＆INPIT

    Control del comportamiento electromecánico de estructuras en un dispositivo de sistemas microelectromecánicos
    9.
    发明专利
    Control del comportamiento electromecánico de estructuras en un dispositivo de sistemas microelectromecánicos 未知

    公开(公告)号：ES2523980T3

    公开(公告)日：2014-12-03

    申请号：ES03759463

    申请日：2003-09-18

    Applicant: QUALCOMM MEMS TECHNOLOGIES INC

    Inventor： MILES MARK W ,  BATEY JOHN ,  CHUI CLARENCE ,  KOTHARI MANISH

    IPC: H01L29/82 ,  B81B20060101 ,  B81B3/00 ,  H01L21/00 ,  H01L21/302 ,  H01L21/461

    Abstract: Un aparato (10) de MEMS, que comprende: un sustrato (24, 42, 62); un electrodo (20, 44, 64), en el que el electrodo (20, 44, 64) está ubicado sobre el sustrato (24, 44, 64); una capa transparente (12, 46, 68), estando ubicada la capa transparente (12, 46, 68) sobre el electrodo (20, 46, 68), y comprendiendo la capa transparente (12, 46, 68) SiO2; una capa (48, 70) de captura de carga, estando ubicada la capa (48, 70) de captura de carga sobre la capa transparente (12, 46, 68) e incluye un material que tiene una densidad de captura de carga para manipular la acumulación de la carga sobre la capa transparente (12, 46, 68), y en el que la capa (48, 70) de captura de carga sirve de capa barrera de ataque químico y es resistente a XeF2; un espacio (16) de aire, en el que el espacio (16) de aire está ubicado adyacente a la capa (48, 70) de captura de carga; y una capa desplazable (14), siendo la capa desplazable (14) reflectante de la luz incidente.

    10.
    发明专利
    未知

    公开(公告)号：AT545055T

    公开(公告)日：2012-02-15

    申请号：AT05798393

    申请日：2005-08-22

    Applicant: QUALCOMM MEMS TECHNOLOGIES INC

    Inventor： CHUI CLARENCE ,  MILES MARK W

    IPC: G02B26/00

    Abstract: An interferometric light modulating device having two viewing surfaces is provided. In some embodiments, the device can generate two distinct images, one on each side of the device, simultaneously.

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