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公开(公告)号：JP2014089457A
公开(公告)日：2014-05-15
申请号：JP2013253670
申请日：2013-12-06
Applicant: Qualcomm Mems Technologies Inc , クゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc.
Inventor： CHUI CLARENCE , SAMPSELL JEFFREY B , CUMMINGS WILLIAM J , TUNG MING-HAU
IPC: G02B26/06 , G02B26/00 , G02F1/1335 , G02F1/136
CPC classification number: G02F1/21 , G02B26/001 , G02F1/1335 , G02F2001/13356
Abstract: PROBLEM TO BE SOLVED: To develop spatial light modulators having integrated optical compensation structures and further provide methods for making the spatial light modulators.SOLUTION: A spatial light modulator 40 comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements 44 are configured to modulate light transmitted through or reflected from the transparent substrate 42.
Abstract translation: 要解决的问题：开发具有集成光学补偿结构的空间光调制器，并且还提供用于制造空间光调制器的方法。解决方案：空间光调制器40包括集成光学补偿结构，例如，布置在基板 以及多个可单独寻址的光调制元件，或位于光调制元件与基板相对的一侧的光学补偿结构。 单独寻址的光调制元件44被配置为调制透射通过透明基板42或从透明基板42反射的光。
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公开(公告)号：JP2012198528A
公开(公告)日：2012-10-18
申请号：JP2012048009
申请日：2012-03-05
Applicant: Qualcomm Mems Technologies Inc , クゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc.
Inventor： CHUI CLARENCE , SAMPSELL JEFFREY B , CUMMINGS WILLIAM J , TUNG MING-HAU
CPC classification number: G02F1/21 , G02B26/001 , G02F1/1335 , G02F2001/13356
Abstract: PROBLEM TO BE SOLVED: To provide a display device comprising an array of addressable light-modulating elements.SOLUTION: A spatial light modulator 40 comprises an integrated passive optical compensation structure 41, or a passive optical compensation structure 41 located on the opposite side of the light-modulating elements 44 from a transparent substrate 42. The individually addressable light-modulating elements 44 are configured to modulate light transmitted through or reflected from the transparent substrate 42. Methods for making the spatial light modulators 40 involve fabricating a passive optical compensation structure 41 over a substrate, and fabricating a plurality of individually addressable light-modulating elements 44 over the passive optical compensation structure 41. The passive optical compensation structure 41 may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.
Abstract translation: 要解决的问题：提供一种包括可寻址光调制元件阵列的显示装置。 解决方案：空间光调制器40包括集成的无源光学补偿结构41或位于光调制元件44的与透明衬底42相反的一侧上的无源光学补偿结构41.可单独寻址的光调制 元件44被配置为调制透射通过透明基板42或从透明基板42反射的光。制造空间光调制器40的方法涉及在基板上制造无源光学补偿结构41，并且制造多个可单独寻址的光调制元件44 无源光学补偿结构41.无源光学补偿结构41可以包括补充前照灯源，扩散器，黑色掩模，衍射光学元件，滤色器，抗反射层，散射的结构中的一个或多个 光，微透镜阵列和全息膜。 版权所有（C）2013，JPO＆INPIT
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公开(公告)号：JP2013178531A
公开(公告)日：2013-09-09
申请号：JP2013078732
申请日：2013-04-04
Applicant: Qualcomm Mems Technologies Inc , クゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc.
Inventor： WANG HSIN-FU , TUNG MING-HAU , STEPHEN ZEE
CPC classification number: G02B26/001 , B81B3/0072 , B81B2201/047 , B81C1/00793 , B81C2201/0167
Abstract: PROBLEM TO BE SOLVED: To provide a device that selectively absorbs and/or reflects light using the principles of optical interference.SOLUTION: Described herein is the use of a diffusion barrier layer between metallic layers in MEMS devices. The diffusion barrier layer prevents mixing of two metals, which may alter desired physical characteristics and complicate processing. In one example, the diffusion barrier layer may be used as part of a movable reflective structure in interferometric modulators.
Abstract translation: 要解决的问题：提供使用光学干涉原理选择性吸收和/或反射光的器件。解决方案：这里描述的是在MEMS器件中的金属层之间使用扩散阻挡层。 扩散阻挡层防止两种金属的混合，这可能改变期望的物理特性并使加工变得复杂。 在一个示例中，扩散阻挡层可以用作干涉式调制器中的可移动反射结构的一部分。
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4.发明专利System and method of illuminating interferometric modulator using backlighting 审中-公开使用背光照射干涉式调制器的系统和方法
公开(公告)号：JP2011039536A
公开(公告)日：2011-02-24
申请号：JP2010208050
申请日：2010-09-16
Applicant: Qualcomm Mems Technologies Inc , クゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc.
Inventor： CHUI CLARENCE , TUNG MING-HAU
CPC classification number: G02B26/001 , G09G3/3406 , G09G3/3466 , H04M1/22 , H04N5/7458 , H04W52/027 , Y02D70/00 , Y02D70/1222 , Y02D70/142 , Y02D70/144 , Y02D70/164 , Y02D70/26 , Y10S359/90
Abstract: PROBLEM TO BE SOLVED: To provide a system and a method of illuminating interferometric modulators using backlighting.
SOLUTION: An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device includes a plurality of interferometric modulator elements, wherein each of the interferometric modulator elements includes an optical cavity. The interferometric modulator array includes an optical aperture region, and at least one reflecting element is positioned so as to receive light passing through the optical aperture region and reflect at least a part of the received light to the cavities of the interferometric modulator elements. In some embodiments, the interferometric modulator elements may be separated from each other such that an optical aperture region is formed between the plurality of adjacent interferometric modulator elements.
COPYRIGHT: (C)2011,JPO&INPITAbstract translation: 要解决的问题：提供使用背光照明干涉式调制器的系统和方法。 公开了具有背光的干涉式调制器阵列器件。 干涉式调制器阵列装置包括多个干涉式调制器元件，其中每个干涉式调制器元件包括光腔。 所述干涉式调制器阵列包括光学孔区域，并且至少一个反射元件被定位成接收穿过所述光学开口区域的光，并将所接收的光的至少一部分反射到所述干涉式调制器元件的空腔。 在一些实施例中，干涉式调制器元件可以彼此分离，使得在多个相邻的干涉式调制器元件之间形成光学孔径区域。 版权所有（C）2011，JPO＆INPIT
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公开(公告)号：JP2011175261A
公开(公告)日：2011-09-08
申请号：JP2011034466
申请日：2011-02-21
Applicant: Qualcomm Mems Technologies Inc , クゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc.
Inventor： CHUI CLARENCE , SAMPSELL JEFFREY B , CUMMINGS WILLIAM J , TUNG MING-HAU
IPC: G02B26/02 , B81B3/00 , G02B26/00 , G02F1/1335 , G02F1/136
CPC classification number: G02F1/21 , G02B26/001 , G02F1/1335 , G02F2001/13356
Abstract: PROBLEM TO BE SOLVED: To provide a spatial light modulator having an integrated optical compensation structure. SOLUTION: The spatial light modulator 40 includes: an integrated optical compensation structure 41, e.g., an optical compensation structure arranged between a substrate 42 and a plurality of individually addressable light-modulating elements 44, or an optical compensation structure located on the opposite side of the light-modulating elements as to the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. A method for manufacturing the spatial light modulator involves fabricating the optical compensation structure over the substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. COPYRIGHT: (C)2011,JPO&INPIT
Abstract translation: 要解决的问题：提供具有集成光学补偿结构的空间光调制器。 解决方案：空间光调制器40包括：集成光学补偿结构41，例如布置在基板42和多个可单独寻址的光调制元件44之间的光学补偿结构，或位于 光调制元件相对于衬底的相对侧。 可单独寻址的光调制元件被配置为调制透射通过或从透明基板反射的光。 制造空间光调制器的方法包括在衬底上制造光学补偿结构，并在光学补偿结构上制造多个单独可寻址的光调制元件。 光学补偿结构可以是无源光学补偿结构。 版权所有（C）2011，JPO＆INPIT
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Patent Agency Ranking
公开(公告)号：JP2011048380A
公开(公告)日：2011-03-10
申请号：JP2010221500
申请日：2010-09-30
Applicant: Qualcomm Mems Technologies Inc , クゥアルコム・メムス・テクノロジーズ・インコーポレイテッドQUALCOMM MEMS Technologies, Inc.
Inventor： CHUI CLARENCE , SAMPSELL JEFFREY B , CUMMINGS WILLIAM J , TUNG MING-HAU
IPC: G02B26/02 , G02B26/00 , G02F1/1335 , G02F1/136 , G09F9/00
CPC classification number: G02F1/21 , G02B26/001 , G02F1/1335 , G02F2001/13356
Abstract: PROBLEM TO BE SOLVED: To provide a spatial light modulator having an integrated optical compensation structure and methods for making the same. SOLUTION: A spatial light modulator 40 comprises an integrated optical compensation structure, e.g., an optical compensation structure 41 arranged between a substrate 42 and a plurality of individually addressable light-modulating elements 44, or located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure, and may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film. COPYRIGHT: (C)2011,JPO&INPIT
Abstract translation: 要解决的问题：提供具有集成光学补偿结构的空间光调制器及其制造方法。 解决方案：空间光调制器40包括集成的光学补偿结构，例如，布置在基板42和多个单独寻址的光调制元件44之间或位于光的相对侧上的光学补偿结构41 从衬底调制元件。 可单独寻址的光调制元件被配置为调制透射通过或从透明基板反射的光。 制造这种空间光调制器的方法包括在衬底上制造光学补偿结构，并在光学补偿结构上制造多个可单独寻址的光调制元件。 光学补偿结构可以是无源光学补偿结构，并且可以包括补充前照灯源，漫射器，黑色掩模，衍射光学元件，滤色器，抗反射层，散射的结构中的一个或多个 光，微透镜阵列和全息膜。 版权所有（C）2011，JPO＆INPIT
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公开(公告)号：JP2012006142A
公开(公告)日：2012-01-12
申请号：JP2011177571
申请日：2011-08-15
Inventor： TUNG MING-HAU , KOGUT LIOR
CPC classification number: B81B3/0072 , B81B2201/042 , B81C1/00047 , B81C2201/0167
Abstract: PROBLEM TO BE SOLVED: To provide a method and apparatus for controlling a depth of a cavity between two layers of a light modulating device.SOLUTION: A method of manufacturing a light modulating device includes the steps of: forming a substrate; forming a sacrificial layer over at least a portion of the substrate; forming a reflective layer over at least a portion of the sacrificial layer; and forming one or more flexure controllers over the substrate. The flexure controllers are configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.
Abstract translation: 要解决的问题：提供一种用于控制光调制装置的两层之间的腔的深度的方法和装置。 解决方案：制造光调制装置的方法包括以下步骤：形成衬底; 在所述衬底的至少一部分上形成牺牲层; 在所述牺牲层的至少一部分上形成反射层; 以及在衬底上形成一个或多个弯曲控制器。 弯曲控制器被构造成可操作地支撑反射层并且在去除牺牲层时形成可以与牺牲层的厚度相差的深度的空腔，其中垂直于衬底测量深度。 版权所有（C）2012，JPO＆INPIT
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8.发明专利
公开(公告)号：JP2012161913A
公开(公告)日：2012-08-30
申请号：JP2012031420
申请日：2012-02-16
Inventor： QUI CHENGBIN , SASAGAWA TERUO , TUNG MING-HAU , WANG CHUN-MING , ZEE STEPHEN
CPC classification number: G02B26/0841 , B81B3/0072 , B81B2201/047 , B81B2203/0163 , B81B2203/019 , B81B2203/0307 , B81B2203/053 , B81C1/00142 , B81C1/00666 , B81C2201/0167 , G02B26/001 , Y10S359/90
Abstract: PROBLEM TO BE SOLVED: To provide a method for forming layers within a MEMS device to achieve a tapered edge.SOLUTION: Certain MEMS devices include layers patterned to have tapered edges. One method for forming layers having tapered edges includes the use of an etch leading layer. Another method for forming layers having tapered edges includes the deposition of a layer in which the upper portion is etchable at a faster rate than the lower portion. Another method for forming layers having tapered edges includes the use of multiple iterative etches. Another method for forming layers having tapered edges includes the use of a liftoff mask having an aperture including a negative angle, such that a layer can be deposited over the liftoff mask and the mask layer is removed, thereby leaving a structure having tapered edges.
Abstract translation: 要解决的问题：提供一种在MEMS器件内形成层以实现锥形边缘的方法。 解决方案：某些MEMS器件包括图案化以具有渐缩边缘的层。 用于形成具有渐缩边缘的层的一种方法包括使用蚀刻引导层。 用于形成具有锥形边缘的层的另一种方法包括沉积一层，其中上部可以比下部更快的速度进行刻蚀。 用于形成具有渐缩边缘的层的另一种方法包括使用多个迭代蚀刻。 用于形成具有锥形边缘的层的另一种方法包括使用具有包括负角的孔的剥离掩模，使得可以在剥离掩模上沉积层并且去除掩模层，从而留下具有渐缩边缘的结构。 版权所有（C）2012，JPO＆INPIT
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公开(公告)号：JP2014209262A
公开(公告)日：2014-11-06
申请号：JP2014135761
申请日：2014-07-01
Inventor： CHUI CLARENCE , WILLIAM CUMMINGS , GALLY BRIAN J , LIOR KOGUT , TUNG MING-HAU , TUNG YEH-JIUN , CHIANG CHIH-WEI , DENIS ENDISCH
CPC classification number: G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
Abstract: 【課題】微小電気機械(MEMS)装置(1300)が、基板(20)、該基板(20)上の可動素子(1340)、及び該可動素子(1340)上の作動電極(142)を備える。【解決手段】可動素子(1340)が、可変層(1302)及び反射素子(1314)を備える。可変層(1302)が、反射素子(1314)から分離される。【選択図】図13A
Abstract translation: 要解决的问题：为了提供一种包括衬底（20）的微机电（MEMS）器件（1300），在衬底（20）上方的可移动元件（1340）以及可移动元件（1340）上方的致动电极（142） 解决方案：可移动元件（1340）包括可变形层（1302）和反射元件（1314）。 可变形层（1302）与反射元件（1314）分离。
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10.发明专利Microelectromechanical device with optical function separated from mechanical and electrical function 有权具有从机械和电气功能分离的光学功能的微电子器件
公开(公告)号：JP2012230407A
公开(公告)日：2012-11-22
申请号：JP2012148339
申请日：2012-07-02
Inventor： CHUI CLARENCE , WILLIAM CUMMINGS , GALLY BRIAN J , LIOR KOGUT , TUNG MING-HAU , TUNG YEH-JIUN , CHIANG CHIH-WEI , DENIS ENDISCH
CPC classification number: G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
Abstract: PROBLEM TO BE SOLVED: To provide a microelectromechanical (MEMS) device (1300) including a substrate (20), a movable element (1340) over the substrate (20), and an actuation electrode (142) above the movable element (1340).SOLUTION: The movable element (1340) includes a deformable layer (1302) and a reflective element (1314). The deformable layer (1302) is separated from the reflective element (1314).
Abstract translation: 要解决的问题：为了提供一种包括衬底（20）的微机电（MEMS）器件（1300），在衬底（20）上方的可移动元件（1340）以及可动元件上方的致动电极（142） （1340）。 解决方案：可移动元件（1340）包括可变形层（1302）和反射元件（1314）。 可变形层（1302）与反射元件（1314）分离。 版权所有（C）2013，JPO＆INPIT
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