Abstract:
A switchable capacitor (100) including a first electrode (104), a dielectric layer (110) on the first electrode (104), a second electrode (106) configured to be suspended in an undeflected position over the dielectric layer (110) in a de-activated state, and to deflect toward the first electrode (104) in an activated state in response to a voltage difference between the two electrodes (104,106), a gap between the second electrode (106) and the dielectric layer (110) in the activated state being less than a corresponding gap in the de-activated state, and a capacitor (120) having a first and second end, coupled to one of the electrodes at the first end, and configured to reduce the voltage difference between the electrodes (104,106) as the second electrode (106) deflects toward the first electrode (104) in the activated state, wherein the voltage difference between the electrodes corresponds to a bias voltage applied across the second end of the capacitor (120) and an other one of the first (104) and second (106) electrodes.