公开(公告)号：DE69834847T2

公开(公告)日：2007-02-15

申请号：DE69834847

申请日：1998-09-24

Applicant: REFLECTIVITY INC

Inventor： HUIBER GERRIT

IPC: G02B26/00 ,  B81B3/00 ,  G02B26/08

Abstract: A spatial light modulator (12) includes an upper optically transmissive substrate (20) held above a lower substrate (34) containing addressing circuitry (36). One or more electrostatically deflectable elements (48) are suspended by hinges (50) from the upper substrate (20). In operation, individual mirrors (48) are selectively deflected and serve to spatially modulate light (56) that is incident to, and then reflected back through, the upper substrate (20). Motion stops (49) may be attached to the reflective deflectable elements so that the mirror (48) does not snap to the bottom substrate (34). Instead, the motion stop (49) rests against the upper substrate (20) thus limiting the deflection angle of the reflective deflectable elements (48).

公开(公告)号：DE69834847D1

公开(公告)日：2006-07-20

申请号：DE69834847

申请日：1998-09-24

Applicant: REFLECTIVITY INC

Inventor： HUIBER GERRIT

IPC: G02B26/00 ,  B81B3/00 ,  G02B26/08

Abstract: A spatial light modulator (12) includes an upper optically transmissive substrate (20) held above a lower substrate (34) containing addressing circuitry (36). One or more electrostatically deflectable elements (48) are suspended by hinges (50) from the upper substrate (20). In operation, individual mirrors (48) are selectively deflected and serve to spatially modulate light (56) that is incident to, and then reflected back through, the upper substrate (20). Motion stops (49) may be attached to the reflective deflectable elements so that the mirror (48) does not snap to the bottom substrate (34). Instead, the motion stop (49) rests against the upper substrate (20) thus limiting the deflection angle of the reflective deflectable elements (48).