公开(公告)号：SG175097A1

公开(公告)日：2011-12-29

申请号：SG2011072899

申请日：2010-04-22

Applicant: RUDOLPH TECHNOLOGIES INC

Inventor： DOE RODNEY BRYAN ,  STROM JOHN ,  MCLAUGHLIN CHRISTOPHER

Abstract: A method of optimizing an optical inspection and fabrication process is herein disclosed. Images, preferably color digital images, of an object are obtained and multiple filter space representations of these images are created. Each of the representations and the channels or data that define them are analyzed separately or in combination with one another to determine which representations, combination of representations, channels, combinations of channels, data or combinations of data provide the most optimal data for analysis by optical inspection algorithms. The process may be automated in terms of the creation of image representations and/or single or multivariate analysis.