公开(公告)号：SG173755A1

公开(公告)日：2011-09-29

申请号：SG2011059540

申请日：2010-02-17

Applicant: RUDOLPH TECHNOLOGIES INC

Inventor： BALAK SCOTT A ,  SUN GANG

公开(公告)号：WO2008033779A3

公开(公告)日：2008-12-04

申请号：PCT/US2007078063

申请日：2007-09-10

Applicant: RUDOLPH TECHNOLOGIES INC ,  SUN GANG

Inventor： SUN GANG

IPC: G06K9/00 ,  G06F19/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/93 ,  G01N21/95607 ,  G01N2021/8887

Abstract: A system and method for inspection of a substrate for various defects is herein disclosed. Polarizing filters (12) are used to improve the contrast of polarization dependent defects such as defocus and exposure defects, while retaining the same sensitivity to polarization independent defects, such as pits, voids, cracks, chips and particles.

Abstract translation: 本文公开了用于检查各种缺陷的基板的系统和方法。 偏振滤波器（12）用于改善偏振相关缺陷的对比度，例如散焦和曝光缺陷，同时保持与偏振无关的缺陷（如凹坑，空隙，裂纹，碎片和颗粒）的相同灵敏度。