公开(公告)号：WO1996005600A1

公开(公告)日：1996-02-22

申请号：PCT/US1994009181

申请日：1994-08-11

Applicant: RUXAM, INC.

Inventor： RUXAM, INC. ,  GOLOVANIVSKY, Konstantin, S. ,  DUGAR-ZHABON, Valeri D.

IPC: G21G04/08

CPC classification number: H05G2/003 ,  H01J35/00

Abstract: A portable x-ray source that produces a sufficient x-ray flux (x) to produce high quality x-ray images on x-ray films. The source includes a vacuum chamber (20) filled with a heavy atomic weight gas at low pressure and an x-ray emitter (30). The chamber (20) is in a magnetic field and an oscillating electric field and generates an Electron Cyclotron Resonance (ECR) Plasma having a ring of energetic electrons inside the chamber (20). The electrons (64) bombard the x-ray emitter (30) which in turn produces x-ray. A pair of magnetic members (61, 62) generate an axisymmetric magnetic mirror trap inside the chamber (20). The chamber (20) may be nested within a microwave resonant cavity (10) and between the magnets (61, 62) or the chamber (20) and the microwave cavity (10) may be a single composite structure.

Abstract translation: 一种便携式x射线源，可产生足够的x射线通量（x），以在x射线胶片上产生高质量的X射线图像。 源包括在低压下填充有重原子量的气体的真空室（20）和x射线发射器（30）。 室（20）处于磁场和振荡电场，并产生在室（20）内具有高能电子环的电子回旋共振（ECR）等离子体。 电子（64）轰击x射线发射器（30），其又产生x射线。 一对磁性构件（61,62）在室（20）内部产生轴对称的磁反射器。 室（20）可以嵌套在微波谐振腔（10）内并且在磁体（61,62）或腔室（20）之间并且微波腔（10）可以是单个复合结构。

公开(公告)号：WO1993017446A1

公开(公告)日：1993-09-02

申请号：PCT/US1993001763

申请日：1993-02-26

Applicant: RUXAM, INC.

Inventor： RUXAM, INC. ,  GOLOVANIVSKY, Konstantin, S. ,  DUGAR-ZHABON, Valeri, D.

IPC: H01J35/00

CPC classification number: H05G2/001 ,  A23L3/01 ,  A23L3/263 ,  A61L2/082 ,  A61L2202/24 ,  C02F1/307 ,  C02F2303/04 ,  H01J35/00 ,  H01J35/14

Abstract: An X-ray source that produces X-rays as a result of igniting an electron cyclotron resonance plasma inside a vacuumated dielectric spherical chamber (11) filled with a heavy atomic weight, non-reactive gas or gas mixture at low pressure. The spherical chamber is located inside a non-vacuumated microwave resonant cavity (13) that is in turn located between two magnets (32, 33) to form a magnetic mirror. Conventional microwave energy fed into the resonant cavity ignites the plasma and creates a hot electron ring which electrons bombard the heavy gas and dielectric material to create an X-ray emission. The X-ray source is suitable for surface and volume sterilization of foodstuffs, packaged goods, medical supplies, blood products and other materials and medical diagnostic and therapeutic devices such as tomography, mammography and radiology.

Abstract translation: X射线源由于在低压下填充有重原子量，非反应性气体或气体混合物的抽真空介电球形室（11）内点燃电子回旋共振等离子体而产生X射线。 球形腔室位于未抽真空的微波谐振腔（13）内，微波谐振腔（13）又位于两个磁体（32,33）之间，以形成磁镜。 馈入谐振腔的常规微波能量点燃等离子体并产生热电子环，电子轰击重气和电介质材料以产生X射线发射。 X射线源适用于食品，包装商品，医疗用品，血液制品和其他材料的表面和体积灭菌以及诸如层析成像，乳房X线照相术和放射学等医疗诊断和治疗装置。

公开(公告)号：WO1995034901A1

公开(公告)日：1995-12-21

申请号：PCT/US1994006841

申请日：1994-06-16

Applicant: RUXAM, INC.

Inventor： RUXAM, INC. ,  GOLOVANIVSKY, Konstantin, S. ,  OMELJANOVSKY, Erazm, M.

IPC: G21K05/00

CPC classification number: G03F7/70033 ,  G03F7/7035 ,  G21K1/06 ,  H01J49/38 ,  H05G2/00

Abstract: Apparatus and methods for submicron lithography of semiconductor materials, circuits and other objects. A source (10) of multiply charged ions (2) is applied to a thin layer of electrically conductive material (54). The recombination of ions and free electrons in the layer produced soft x-ray radiation which is used to irradiate an object (50). The object may include a semiconductor substrate, an x-ray sensitive resist, and an x-ray absorbing mask for forming semiconductor devices. The soft x-rays are produced by careful selection of the type and energy of multiply charged ions and the thickness of the thin electrically conductive layer, which may be a light element metal.

Abstract translation: 用于半导体材料，电路和其他物体的亚微米光刻的装置和方法。 将多电荷离子（2）的源（10）施加到导电材料（54）的薄层。 层中的离子和自由电子的重组产生用于照射物体（50）的软x射线辐射。 该物体可以包括半导体衬底，x射线敏感抗蚀剂和用于形成半导体器件的x射线吸收掩模。 通过仔细选择多电荷离子的类型和能量以及可以是轻元素金属的薄导电层的厚度来产生软X射线。