公开(公告)号：WO2010101986A8

公开(公告)日：2011-03-31

申请号：PCT/US2010026024

申请日：2010-03-03

Applicant: S3C INC ,  SUMINTO JAMES TJANMENG ,  YUNUS MOHAMMAD

Inventor： SUMINTO JAMES TJANMENG ,  YUNUS MOHAMMAD

IPC: G01L9/06

CPC classification number: B81C1/00158 ,  G01L9/0042 ,  G01L9/0055 ,  G01L19/147

Abstract: A pressure sensor is described with sensing elements electrically and physically isolated from a pressurized medium. An absolute pressure sensor has a reference cavity, which can be at a vacuum or zero pressure, enclosing the sensing elements. The reference cavity is formed by bonding a recessed cap wafer with a gauge wafer having a micromachined diaphragm. Sensing elements are disposed on a first side of the diaphragm. The pressurized medium accesses a second side of the diaphragm opposite to the first side where the sensing elements are disposed. A spacer wafer may be used for structural support and stress relief of the gauge wafer. In one embodiment, vertical through-wafer conductive vias are used to bring out electrical connections from the sensing elements to outside the reference cavity. In an alternative embodiment, peripheral bond pads on the gauge wafer are used to bring out electrical connections from the sensing elements to outside the reference cavity

Abstract translation: 描述了一种压力传感器，其具有与加压介质电气和物理隔离的感测元件。 绝对压力传感器具有可以处于真空或零压力的参考腔，包围感测元件。 参考空腔通过将具有微加工膜片的规格晶片与凹形盖晶片结合而形成。 感测元件设置在隔膜的第一侧上。 加压介质访问隔膜的与传感元件设置的第一侧相对的第二侧。 间隔晶片可用于测量晶片的结构支撑和应力释放。 在一个实施例中，垂直透晶片导电通孔用于引出从感测元件到参考腔外部的电连接。 在替代实施例中，测量晶片上的外围接合焊盘用于引出从感测元件到参考腔外部的电连接

公开(公告)号：EP2404150A4

公开(公告)日：2013-08-07

申请号：EP10749253

申请日：2010-03-03

Applicant: S3C INC

Inventor： SUMINTO JAMES TJANMENG ,  YUNUS MOHAMMAD

IPC: G01L9/00 ,  G01L19/14

CPC classification number: B81C1/00158 ,  G01L9/0042 ,  G01L9/0055 ,  G01L19/147