公开(公告)号：EP2401603A4

公开(公告)日：2017-08-30

申请号：EP10745839

申请日：2010-02-26

Applicant: SAINT-GOBAIN GLASS FRANCE

Inventor： SCHWEITZER JEAN-PHILIPPE ,  LI HUIFEN ,  LIN XIAOFENG ,  GUO FENG ,  GUO XIAOFENG

IPC: G01N21/896

CPC classification number: G01N21/896 ,  G01N21/898 ,  G01N2021/8854 ,  G01N2021/8874 ,  H02S50/15

公开(公告)号：EP2459989A4

公开(公告)日：2017-03-29

申请号：EP10803821

申请日：2010-02-26

Applicant: SAINT-GOBAIN GLASS FRANCE

Inventor： SCHWEITZER JEAN-PHILIPPE ,  LI HUIFEN ,  LIN XIAOFENG ,  GUO XIAOFENG ,  GUO FENG ,  SUN XIAOWEI

IPC: G01N21/896

CPC classification number: G01N21/896 ,  G01N2021/8967

Abstract: A method and system for detecting and classifying a defect of a substrate, the system including a first channel, including a first illuminating unit to irradiate a light to a substrate and a first imaging unit to take images by sensing a light from the substrate when it is irradiated; a second channel, including a second illuminating unit to irradiate a light to the substrate and a second imaging unit to take images by sensing a light from the substrate when it is irradiated; an image constructing module to construct two images of the substrate using the images of the first and second imaging units respectively; and an image processing module to detect, when the substrate has a defect, that the defect is a defect on or in the substrate, based on a relationship of positions where the defect of the substrate appears in the two images of the substrate.