公开(公告)号：EP0572234B1

公开(公告)日：1997-12-29

申请号：EP93304082

申请日：1993-05-26

Applicant: MITSUBISHI CHEM CORP ,  SCALAR CORP

Inventor： ISHIKAWA SEIJI ,  HIRAI MASANORI ,  MURAKAMI HAJIME ,  YAMAMOTO MASAO

IPC: H04N5/225 ,  H04N9/04

CPC classification number: H04N5/2256 ,  H04N9/045

公开(公告)号：DE69525007D1

公开(公告)日：2002-02-21

申请号：DE69525007

申请日：1995-09-29

Applicant: SCALAR CORP

Inventor： MURAKAMI HAJIME

IPC: G01N21/88 ,  G02B21/10 ,  G02B21/12

Abstract: A lighting device for an observation/image pickup apparatus capable of satisfactorily illuminating a surface of an observed section of a specimen sample for observation irrespective of whether a fine roughness is provided on the specimen surface. Illumination control slit members for laterally projected light, deflected oblique light, vertically projected light, and light composed of laterally projected light and vertically projected light, are provided, and selectively face an illumination light introducing section, to thereby convert illumination light (introduced through the illumination light introducing section) into any desired one of: laterally projected light, deflected oblique light, vertically projected light, and light composed of laterally projected light and vertically projected light, resulting in a surface of an observed section of a specimen sample being illuminated with the converted light.

公开(公告)号：DE69525007T2

公开(公告)日：2002-09-26

申请号：DE69525007

申请日：1995-09-29

Applicant: SCALAR CORP

Inventor： MURAKAMI HAJIME

IPC: G01N21/88 ,  G02B21/10 ,  G02B21/12

Abstract: A lighting device for an observation/image pickup apparatus capable of satisfactorily illuminating a surface of an observed section of a specimen sample for observation irrespective of whether a fine roughness is provided on the specimen surface. Illumination control slit members for laterally projected light, deflected oblique light, vertically projected light, and light composed of laterally projected light and vertically projected light, are provided, and selectively face an illumination light introducing section, to thereby convert illumination light (introduced through the illumination light introducing section) into any desired one of: laterally projected light, deflected oblique light, vertically projected light, and light composed of laterally projected light and vertically projected light, resulting in a surface of an observed section of a specimen sample being illuminated with the converted light.