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    OPTICAL COUPLING SYSTEM FOR INSPECTING INTEGRATED CIRCUIT DEVICE
    1.
    发明专利
    OPTICAL COUPLING SYSTEM FOR INSPECTING INTEGRATED CIRCUIT DEVICE 审中-公开

    公开(公告)号：JP2002303654A

    公开(公告)日：2002-10-18

    申请号：JP2001390123

    申请日：2001-12-21

    Applicant: SCHLUMBERGER TECHNOLOGIES INC

    Inventor： WILSHER KENNETH R ,  KASAPI STEVEN A

    IPC: G01R1/06 ,  G01R31/302 ,  G01R31/311 ,  G01R31/319 ,  H01L21/66

    Abstract: PROBLEM TO BE SOLVED: To provide an IC device-testing method and an IC device-testing system for inexpensively applying a laser beam different targets of a semiconductor IC device (DUT) to be inspected simultaneously in parallel, speedily successively without requiring any rematching in a microscope. SOLUTION: The method and the system test an integrated circuit (IC) by optical coupling. The optical system includes an optical fiber, a mounting tool, and a focusing element. Also, a channel for accommodating the optical system is provided at the mounting tool where the integrated circuit is mounted. The mounting tool operates as a heat sink. At least one photosensitive element/target on the IC is inspected by light being is guided so that light is focused on each target. By the light, data are latched by an IC that is operating under the influence of a test program, test pattern output is obtained from the IC, and it is judged whether the IC is in an appropriate operation state or not according to the test pattern output.

    DUAL LASER VOLTAGE PROBING FOR IC
    2.
    发明专利
    DUAL LASER VOLTAGE PROBING FOR IC 失效

    公开(公告)号：JPH112667A

    公开(公告)日：1999-01-06

    申请号：JP6583498

    申请日：1998-03-16

    Applicant: SCHLUMBERGER TECHNOLOGIES INC

    Inventor： WILSHER KENNETH R ,  RAJAN SURESH N ,  LO WILLIAM K

    IPC: G01R31/302 ,  G01R31/311 ,  H01L21/66

    Abstract: PROBLEM TO BE SOLVED: To provide a dual laser probe system and a method by which noise can be compensated without increasing the number of samples to be averaged for obtaining an appropriate S/N ratio and its method. SOLUTION: While an IC device (DUT) 640 is tested, dual laser voltage probing uses a probe beam for sampling waveforms on the DUT 640 during each cycle period of a test pattern impressed upon the DUT 640 and also uses a reference laser beam 612 for sampling the DUT 640. In each cycle of the test pattern, the DUT 640 is sampled in such a relation that the reference beam and probe beam are temporally displaced from each other at the same physical position. Each reference measurement is performed to the test pattern at fixed time and probe measurement is performed by scanning through an interested test pattern-time part in a normal mode against equivalent time sampling and a waveform is reproduced. The ratio between these two measured values is calculated for each test cycle.

    LATCH WITH BUILT-IN CHIP DRIVEN BY LIGHT FOR INSPECTING INTEGRATED CIRCUIT DEVICE
    3.
    发明专利
    LATCH WITH BUILT-IN CHIP DRIVEN BY LIGHT FOR INSPECTING INTEGRATED CIRCUIT DEVICE 审中-公开

    公开(公告)号：JP2002207068A

    公开(公告)日：2002-07-26

    申请号：JP2001303461

    申请日：2001-09-28

    Applicant: SCHLUMBERGER TECHNOLOGIES INC

    Inventor： WILSHER KENNETH R

    IPC: G01R31/28 ,  G01R31/302 ,  G01R31/311 ,  G01R31/3185 ,  H01L21/822 ,  H01L27/04

    Abstract: PROBLEM TO BE SOLVED: To provide a diagnosis latch function having a high timing accuracy into a semiconductor IC device to be inspected (DUT) so as to enhance the detection reliability for faults intermittently generated at high speed in the DUT. SOLUTION: There are provided a method for testing integrated circuits such as flip chip integrated circuits or the like and a circuit with built-in chip. An additional circuit is set in addition to conventional circuits to the integrated circuit, which includes a photo detection element such as a photodiode or the like having its output terminal connected via a Schmitt trigger circuit to a clock terminal of a chip-incorporating flip flop. A node of the integrated circuit to be inspected, that is, for example, an output terminal of a logic gate is connected to a D input terminal of the flip-flop. Light entering the photo detection element clock drives the flip-flop circuit thereby enabling sampling a state of output signals from the logic gate. Advantageously, forming a photo detection diode separately is not required and the function can be constituted of, e.g. a drain of a standard CMOS transistor.

    2-PULSE UTILIZED OPTICAL INTERFEROMETER FOR PRECISION INSPECTION WITH WAVEFORM OF INTEGRATED CIRCUIT DEVICE
    5.
    发明专利
    2-PULSE UTILIZED OPTICAL INTERFEROMETER FOR PRECISION INSPECTION WITH WAVEFORM OF INTEGRATED CIRCUIT DEVICE 失效

    公开(公告)号：JP2001159665A

    公开(公告)日：2001-06-12

    申请号：JP2000288647

    申请日：2000-09-22

    Applicant: SCHLUMBERGER TECHNOLOGIES INC

    Inventor： WILSHER KENNETH R ,  LO WILLIAM K

    IPC: G01R1/06 ,  G01N21/45 ,  G01N21/59 ,  G01R31/28 ,  G01R31/302 ,  G01R31/311 ,  H01L21/66

    Abstract: PROBLEM TO BE SOLVED: To provide an interferometer type method for a waveform probe requiring no setting of a reference point near the active region on a semiconductor IC device (DUT) without affected by mechanical vibration nor temperature- induced movement of the DUT. SOLUTION: A semiconductor integrated circuit device DUT 640 is provided with probe light pulse and reference pulse during each repetition cycle of the electric test pattern signal applied repeatedly, for guiding the same optical path as to sample the electric waveform on the DUT. The pulse width of the probe pulses is shorter than the cycle of maximum frequency component signal of the test pattern, for wide band measurement of the test pattern waveform. The reference pulse is supplied at a fixed time point to the test pattern. During a series of test pattern cycles, scanning with a probe pulse 609 of the test pattern is performed so that it is vertical to an equivalent time sampling for re- configuration of DUT waveform.

    10.
    发明专利
    未知

    公开(公告)号：FR2824640A1

    公开(公告)日：2002-11-15

    申请号：FR0116591

    申请日：2001-12-20

    Applicant: SCHLUMBERGER TECHNOLOGIES INC

    Inventor： WILSHER KENNETH R ,  KASAPI STEVEN A

    IPC: G01R1/06 ,  G01R31/302 ,  G01R31/311 ,  G01R31/319 ,  H01L21/66 ,  G01R31/307 ,  G02B6/26 ,  G02B27/00 ,  H01L31/0232

    Abstract: A method and system of testing integrated circuits (IC) via optical coupling. The optical system includes an optical fiber, fixture and focusing element. In addition, channels are provided in the fixture mounted on the integrated circuit to accommodate the optical system. The fixture acts as a heat sink. As such, one or more photosensitive elements/targets on the integrated circuit are probed using light that is brought to a focus on each target site. The light causes latching of data into the integrated circuit (which is operating under influence of a test program) and formation of a test pattern output from the integrated circuit that is used to confirm proper functioning of the IC.

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