公开(公告)号：EP2827116A4

公开(公告)日：2015-11-18

申请号：EP13758563

申请日：2013-03-06

Applicant: SEIKO EPSON CORP

Inventor： UEMATSU AKIRA ,  TERASHIMA YOSHIYUKI ,  SATO YOICHI ,  MATSUO ATSUSHI

IPC: G01J1/06 ,  A61B5/0245 ,  A61B5/1455 ,  G01J3/02 ,  G01J3/26 ,  G01N21/27 ,  H01L27/14

CPC classification number: G01J1/06 ,  A61B5/02427 ,  A61B5/14532 ,  A61B5/1455 ,  G01B11/26 ,  G01J1/0204 ,  G01J1/0437 ,  G01J1/0488 ,  G01J1/42 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0289 ,  G01J3/26 ,  G01J3/36 ,  G01J3/51 ,  G01J3/513 ,  H01L27/14625

Abstract: To provide an optical sensor, an electronic apparatus, etc. that suppress reduction of spectroscopic characteristics. The optical sensor includes a light receiving element, an optical filter 140 that transmits light having a specific wavelength of incident light with respect to a light receiving region of the light receiving element, and an angle limiting filter 120 that limits an incident angle of the incident light transmitted through the optical filter 140. Supposing that a limitation angle of the angle limiting filter 120 is ¸A, a height from an upper surface of the angle limiting filter 120 to an upper surface of the optical filter is RTP, and a distance from an end of the optical filter 140 to an end of an aperture of the angle limiting filter 120 in a plan view with respect to the upper surface of the angle limiting filter 120 is an overlap distance OV, tan -1 (OV/RTP) > ¸A is satisfied.

公开(公告)号：JP2012194055A

公开(公告)日：2012-10-11

申请号：JP2011058182

申请日：2011-03-16

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： UEMATSU AKIRA ,  TERAJIMA YOSHIYUKI ,  SATO YOICHI ,  MATSUO ATSUSHI

IPC: G01J3/26 ,  G01J1/02 ,  G01J1/06 ,  G01N21/27

CPC classification number: H01L31/02327 ,  H01L31/103

Abstract: PROBLEM TO BE SOLVED: To provide an optical sensor and an electronic apparatus that are capable of limiting an incident angle with high accuracy even if there is a gap area in a side wall.SOLUTION: An optical sensor includes: an impurity area 30 for a photo diode formed on a semiconductor substrate 10; and an angle limiting filter 40 for limiting an incident angle of incident light with respect to a light receiving area of the photo diode. The angle limiting filter 40 is formed by at least a first plug corresponding to a first insulating layer and a second plug corresponding to a second insulating layer which is above the first insulating layer. There is a gap area, between the first plug and the second plug, where a gap interval b is λ/2 or less.

Abstract translation: 要解决的问题：提供即使在侧壁中存在间隙区域也能够以高精度限制入射角的光学传感器和电子设备。 解决方案：光学传感器包括：形成在半导体衬底10上的光电二极管的杂质区域30; 以及用于限制入射光相对于光电二极管的光接收面积的入射角的角度限制滤光器40。 角度限制滤光器40由对应于第一绝缘层的至少第一插塞和与第一绝缘层之上的第二绝缘层相对应的第二插塞形成。 在第一插头和第二插头之间存在间隙区域，间隙区间b为λ/ 2以下。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2013185887A

公开(公告)日：2013-09-19

申请号：JP2012049983

申请日：2012-03-07

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： UEMATSU AKIRA ,  TERAJIMA YOSHIYUKI ,  SATO YOICHI ,  MATSUO ATSUSHI

IPC: G01J1/06 ,  A61B5/0245 ,  A61B5/1455 ,  G01J3/26 ,  G01N21/27 ,  H01L27/14

CPC classification number: G01J1/06 ,  A61B5/02427 ,  A61B5/14532 ,  A61B5/1455 ,  G01B11/26 ,  G01J1/0204 ,  G01J1/0437 ,  G01J1/0488 ,  G01J1/42 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0289 ,  G01J3/26 ,  G01J3/36 ,  G01J3/51 ,  G01J3/513 ,  H01L27/14625

Abstract: PROBLEM TO BE SOLVED: To provide an optical sensor that suppresses a reduction in spectral characteristics, and further to provide an electronic apparatus and the like.SOLUTION: An optical sensor includes: a light receiving element; an optical filter 140 for transmitting light having a specific wavelength out of incident light to a light receiving region of the light receiving element therethrough; and an angle limiting filter 120 for limiting an incident angle of the incident light having passed through the optical filter 140. When a limited angle of the angle limiting filter 120 is denoted by θA, a height from an upper face of the angle limiting filter 120 to an upper face of the optical filter 140 is denoted by RTP and a distance from an edge of the optical filter 140 to an edge of an opening of the angle limiting filter 120 is denoted by an overlap distance OV in a plan view with respect to the upper face of the angle limiting filter 120, θA, RTP and OV satisfy an expression of tan(OV/RTV)>θA.

Abstract translation: 要解决的问题：提供抑制光谱特性降低的光学传感器，并进一步提供电子设备等。解决方案：光学传感器包括：光接收元件; 用于将具有特定波长的入射光的光透射到光接收元件的光接收区域的滤光器140; 以及用于限制已经通过滤光器140的入射光的入射角的角度限制滤光器120.当角度限制滤光器120的有限角度由下式表示：A，来自角度限制的上表面的高度 滤光器120到滤光器140的上表面由RTP表示，并且从光学滤光器140的边缘到角度限制滤光器120的开口的边缘的距离由平面图中的重叠距离OV表示为具有 相对于角度限制滤光器120的上表面，A，RTP和OV满足tan（OV / RTV）>＆Theta的表达式; A。

公开(公告)号：JP2012194054A

公开(公告)日：2012-10-11

申请号：JP2011058181

申请日：2011-03-16

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： UEMATSU AKIRA ,  TERAJIMA YOSHIYUKI ,  SATO YOICHI ,  MATSUO ATSUSHI

IPC: G01J1/06 ,  G01J3/26 ,  G01N21/27 ,  H01L27/14 ,  H01L31/10

CPC classification number: G01J1/06 ,  G01J1/0488 ,  G01J3/26 ,  G01J3/36 ,  G01J3/513 ,  G01J2003/1213

Abstract: PROBLEM TO BE SOLVED: To provide an optical sensor and an electronic apparatus that are capable of controlling an incidence limiting angle of incident light with high accuracy.SOLUTION: An optical sensor includes a light receiving element (for example, a photo diode 30) and an angle limiting filter 40 for limiting an incident angle of incident light with respect to a light receiving area of the light receiving element. When a wave length of the incident light is regarded as λ, the height of the angle limiting filter is regarded as R, and the width of an opening of the angle limiting filter is regarded as d, d/λR≥2 is satisfied.

Abstract translation: 要解决的问题：提供能够高精度地控制入射光的入射限制角度的光学传感器和电子设备。 解决方案：光学传感器包括光接收元件（例如，光电二极管30）和用于限制入射光相对于光接收元件的光接收区域的入射角的角度限制滤光器40。 当入射光的波长被认为是λ时，角度限制滤波器的高度被认为是R，角度限制滤波器的开口宽度被认为是d，d 2 /λR≥2。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2011185634A

公开(公告)日：2011-09-22

申请号：JP2010048848

申请日：2010-03-05

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： UEMATSU AKIRA ,  SATO YOICHI ,  KOMATSU AKIRA ,  YANO KUNIHIKO

IPC: G01J3/36 ,  G01J3/26 ,  G01N21/27 ,  H01L27/146

CPC classification number: G01N21/31 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0278 ,  G01J3/28 ,  G01J3/36 ,  G01J3/51 ,  G01J2003/1226 ,  G02B5/285 ,  G02B7/006 ,  H01L27/1443 ,  H01L27/14625

Abstract: PROBLEM TO BE SOLVED: To provide a spectroscopic sensor, along with an electronic apparatus or the like, capable of being miniaturized. SOLUTION: A spectroscopic sensor device includes a light source 110, and a spectroscopic sensor 100 upon which light acquired by irradiating an observation object with light from the light source 110 is incident. The spectroscopic sensor 100 includes a plurality of optical bandpass filters 61-64 whose transmittable wavelength are different, and a plurality of photosensors 31-34. The first optical bandpass filter 61 has a wavelength characteristic capable of transmitting a first specific wavelength, and the second optical bandpass filter 62 has a wavelength characteristic capable of transmitting a second specific wavelength different from the first specific wavelength. The first photosensor 31 senses light of the first specific wavelength transmitted through the first optical bandpass filter, and the second photosensor senses light of the second specific wavelength transmitted through the second optical bandpass filter. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供能够小型化的光谱传感器以及电子设备等。 解决方案：光谱传感器装置包括光源110和光谱传感器100，在该光谱传感器100上，通过用来自光源110的光照射观察对象而获取的光。 光谱传感器100包括可透射波长不同的多个光学带通滤波器61-64，以及多个光电传感器31-34。 第一光带通滤波器61具有能够发射第一特定波长的波长特性，第二光带通滤波器62具有能够发射与第一特定波长不同的第二特定波长的波长特性。 第一光传感器31感测通过第一光学带通滤波器传输的第一特定波长的光，并且第二光传感器感测通过第二光学带通滤波器传输的第二特定波长的光。 版权所有（C）2011，JPO＆INPIT