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公开(公告)号:US10957727B2
公开(公告)日:2021-03-23
申请号:US16142231
申请日:2018-09-26
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Byounghee Lee , Ulrich Boettiger
IPC: H01L27/146 , G02F1/1335
Abstract: An image sensor may include phase detection pixels that gather phase detection data. The phase detection pixels may be formed in phase detection pixel groups with two or more phase detection pixels covered by a single microlens. Each phase detection pixel may have an asymmetric angular response to incident light. Phase detection pixels may be covered by diffractive lenses. A diffractive lens may cover a phase detection pixel pair to improve angular separation between the pixels. A diffractive lens may partially cover a phase detection pixel in a phase detection pixel pair to shift the angular response and account for an off-axis chief ray angle of the phase detection pixel pair.
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公开(公告)号:US09935146B1
公开(公告)日:2018-04-03
申请号:US15383430
申请日:2016-12-19
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Byounghee Lee
IPC: H01L31/062 , H01L27/146
CPC classification number: H01L27/14627 , H01L27/14621 , H01L27/14629 , H01L27/14645 , H01L27/14685 , H01L27/14689
Abstract: In order to increase angular response or otherwise customize the response of phase detection pixels to incident light, phase detection pixels may include optical structures. The optical structures may be formed between a microlens and at least first and second photodiodes to redirect incident light between the microlens and the photodiodes. The optical structures may include two or more layers with different indices of refraction. For example, a layer of silicon dioxide and a layer of silicon nitride may form a concave lens that increases the angular response of phase detection pixels. The optical structures may have any desired shape to customize the response of the photodiodes to incident light.
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公开(公告)号:US11289524B2
公开(公告)日:2022-03-29
申请号:US16402429
申请日:2019-05-03
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Marc Allen Sulfridge , Byounghee Lee , Ulrich Boettiger
IPC: H01L27/146 , H01L31/107 , H04N5/351 , H04N5/378 , H04N5/369
Abstract: An imaging device may include a plurality of single-photon avalanche diode (SPAD) pixels. The SPAD pixels may be overlapped by square toroidal microlenses to direct light incident on the pixels onto photosensitive regions of the pixels. The square toroidal microlenses may be formed as first and second sets of microlenses aligned with every other SPAD pixel and may allow the square toroidal microlenses to be formed without gaps between adjacent lenses. Additionally or alternatively, a central portion of each square toroidal microlenses may be filled by a fill-in microlens. Together, the square toroidal microlenses and the fill-in microlenses may form convex microlenses over each SPAD pixel. The fill-in microlenses may be formed from material having a higher index of refraction than material that forms the square toroidal microlenses.
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公开(公告)号:US10957730B2
公开(公告)日:2021-03-23
申请号:US16598327
申请日:2019-10-10
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Byounghee Lee
IPC: H01L27/146 , G02B3/00
Abstract: An image sensor may include an array of imaging pixels. Each imaging pixel may have a photosensitive area that is covered by a respective multipart diffractive lens to focus light onto the photosensitive area. The multipart diffractive lenses may have multiple portions with different indices of refraction. The portions of the diffractive lenses closer to the center of the diffractive lenses may have higher indices of refraction to focus light. Alternatively, the portions of the diffractive lenses closer to the center of the diffractive lenses may have lower indices of refraction to defocus light. The multipart diffractive lenses may have stacked layers with the same refractive indices but different widths.
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公开(公告)号:US10608030B2
公开(公告)日:2020-03-31
申请号:US16361543
申请日:2019-03-22
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Byounghee Lee
Abstract: An image sensor may include an array of imaging pixels. Each imaging pixel may have a photosensitive area that is covered by a respective diffractive lens to focus light onto the photosensitive area. The diffractive lenses may have a higher index of refraction than the surrounding materials. The diffractive lenses may be formed on an upper or lower surface of a planarization layer or may be embedded within the planarization layer. In some cases, multiple diffractive lenses may be formed over the imaging pixels. Some of the multiple diffractive lenses may have refractive indexes lower than the planarization layer such that the diffractive lenses defocus light. Focusing and defocusing diffractive lenses may be used to tune the response of the imaging pixels to incident light.
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公开(公告)号:US10700113B2
公开(公告)日:2020-06-30
申请号:US16387919
申请日:2019-04-18
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Byounghee Lee
Abstract: An image sensor may include an array of imaging pixels. Each imaging pixel may have a photosensitive area that is covered by a microlens and a diffractive lens that focuses light onto the photosensitive area. The diffractive lens may be interposed between the microlens and the photosensitive area. The diffractive lens may have a higher index of refraction than the surrounding materials. The diffractive lens may be formed as a portion of an anti-reflection coating. In some cases, multiple diffractive lenses may be formed over the imaging pixels. Focusing and defocusing diffractive lenses may be used to tune the response of the imaging pixels to incident light.
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公开(公告)号:US10483309B1
公开(公告)日:2019-11-19
申请号:US16125479
申请日:2018-09-07
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Byounghee Lee
IPC: H01L27/146
Abstract: An image sensor may include an array of imaging pixels. Each imaging pixel may have a photosensitive area that is covered by a respective multipart diffractive lens to focus light onto the photosensitive area. The multipart diffractive lenses may have multiple portions with different indices of refraction. The portions of the diffractive lenses closer to the center of the diffractive lenses may have higher indices of refraction to focus light. Alternatively, the portions of the diffractive lenses closer to the center of the diffractive lenses may have lower indices of refraction to defocus light. The multipart diffractive lenses may have stacked layers with the same refractive indices but different widths.
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公开(公告)号:US11942498B2
公开(公告)日:2024-03-26
申请号:US17651916
申请日:2022-02-22
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Marc Allen Sulfridge , Byounghee Lee , Ulrich Boettiger
IPC: H01L31/0232 , H01L27/146 , H01L31/107 , H04N25/50 , H04N25/702 , H04N25/75
CPC classification number: H01L27/14627 , H01L27/14685 , H01L31/107 , H04N25/50 , H04N25/702 , H04N25/75
Abstract: An imaging device may include a plurality of single-photon avalanche diode (SPAD) pixels. The SPAD pixels may be overlapped by square toroidal microlenses to direct light incident on the pixels onto photosensitive regions of the pixels. The square toroidal microlenses may be formed as first and second sets of microlenses aligned with every other SPAD pixel and may allow the square toroidal microlenses to be formed without gaps between adjacent lenses. Additionally or alternatively, a central portion of each square toroidal microlenses may be filled by a fill-in microlens. Together, the square toroidal microlenses and the fill-in microlenses may form convex microlenses over each SPAD pixel. The fill-in microlenses may be formed from material having a higher index of refraction than material that forms the square toroidal microlenses.
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公开(公告)号:US10861890B2
公开(公告)日:2020-12-08
申请号:US16598284
申请日:2019-10-10
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Byounghee Lee
IPC: G01J1/16 , H01L31/0232 , H04N5/374 , H01L27/146 , H04N5/335 , H01L31/0216 , G01J1/04 , G01J3/28 , G06K9/20 , G06F3/03
Abstract: Image sensors may include plasmonic color filter elements that transmit specific wavelengths of incident light. Each plasmonic color filter element may be interposed between a respective microlens and photosensitive area. The plasmonic color filter elements may be formed from a metal layer such as gold, silver, platinum, aluminum, or copper and may have a pattern of openings in the metal layer that is designed to allow transmission of a certain type of light. To prevent cross-talk between adjacent pixels having plasmonic color filter elements, metal walls may be interposed between adjacent plasmonic color filter elements. The metal walls may extend above the upper surface of the metal layer that forms the plasmonic color filter elements. The metal walls may run around the periphery of each plasmonic color filter element.
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公开(公告)号:US10312280B2
公开(公告)日:2019-06-04
申请号:US15719181
申请日:2017-09-28
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Byounghee Lee
Abstract: An image sensor may include an array of imaging pixels. Each imaging pixel may have a photosensitive area that is covered by a microlens and a diffractive lens that focuses light onto the photosensitive area. The diffractive lens may be interposed between the microlens and the photosensitive area. The diffractive lens may have a higher index of refraction than the surrounding materials. The diffractive lens may be formed as a portion of an anti-reflection coating. In some cases, multiple diffractive lenses may be formed over the imaging pixels. Focusing and defocusing diffractive lenses may be used to tune the response of the imaging pixels to incident light.
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