公开(公告)号：WO1991010888A1

公开(公告)日：1991-07-25

申请号：PCT/US1991000206

申请日：1991-01-10

Applicant: SETRA SYSTEMS, INC.

Inventor： SETRA SYSTEMS, INC. ,  LEE, Shih-Ying

IPC: G01L07/08

CPC classification number: G01L9/0072

Abstract: A flush-mounted sensor measures the pressure of a fluid within a hollow conduit (26). A sensor head (18) edge-mounts an isolating diaphragm (12) responsive to the pressure of the fluid. The isolating diaphragm (12) has a small diameter, typically less than 1/4 inch, is adjacent the fluid in the conduit (26) to reduce the dead volume of fluid adjacent the diaphragm (12), formed of a material that is compatible with the fluid. A drive rod (14) mechanically couples the isolating diaphragm (12) to a second diaphragm (16) of a variable capacitor assembly (17). The second diaphragm (16) is also edge-mounted and produces a counterforce acting on the side of the isolating diaphragm (12) opposite the side adjacent the fluid. The force of the fluid pressure acting on the isolating diaphragm (12) is transmitted by the drive rod (14) to the second diaphragm (16) where changes in the capacitance correspond to changes in the pressure. In another form the isolating diaphragm is formed as a thin, non-circular portion of the conduit wall.

公开(公告)号：WO1991007645A1

公开(公告)日：1991-05-30

申请号：PCT/US1990006393

申请日：1990-11-05

Applicant: SETRA SYSTEMS, INC.

Inventor： SETRA SYSTEMS, INC. ,  LEE, Shih-Ying

IPC: G01L09/04

CPC classification number: G01L9/0004 ,  A61M2205/3331 ,  G01L9/0002 ,  G01L9/0005

Abstract: A transducer measures the pressure of a fluid within a hollow conduit, typically one with a circular cross-section, having a central region that is deformed to a non-circular cross-section. This non-circular portion of the conduit displaces radially and repeatably without hysteresis in response to the pressure of the fluid in the conduit in a manner that corresponds to the pressure. A variable capacitor assembly (26), or a set of strain gauges (A, B, C, D) mounted on the exterior of the non-circular portion, produce an electrical signal proportional to the radial displacement or to the strain, respectively. In one capacitive form (26) a pair of electrodes (24) are mounted on opposite sides of the non-circular portion formed as free end portions of metallic sheet members with a central channel. In another capacitive form (26') electrodes (24') are mounted at one or both ends of lever arms which in turn are coupled to the non-circular portion with a set of flexure plates (34, 36) to produce a mechanical amplification of the radial displacement.

公开(公告)号：WO1995020230A1

公开(公告)日：1995-07-27

申请号：PCT/US1995000851

申请日：1995-01-20

Applicant: SETRA SYSTEMS, INC.

Inventor： SETRA SYSTEMS, INC. ,  LEE, Shih-Ying

IPC: H01G07/00

CPC classification number: G01L9/0072

Abstract: A variable capacitance type pressure sensor (10) with excellent manufacturability center-mounts an electrode (20) on an edge-mounted diaphragm (16) using a metal-glass-metal subassembly (18). An inner metal post (28) of the assembly is welded to the diaphragm (16). A solder or flowable cement (36) secures the electrode (20) to an outer metal collar (32) of the assembly (18) with the initial diaphragm-to-electrode spacing (38) set by a temporary shim (40). The position of the glass (30) and the physical lengths of the metallic members (28, 32) of the assembly are adjusted to provide self-compensation for temperature variations.

Abstract translation: 具有优异制造性的可变电容型压力传感器（10）使用金属玻璃 - 金属子组件（18）将电极（20）中心安装在边缘安装的隔膜（16）上。 组件的内金属柱（28）焊接到隔膜（16）。 焊料或可流动的水泥（36）将电极（20）固定到组件（18）的外部金属套环（32）上，其中由临时垫片（40）设定的初始隔膜 - 电极间隔（38）。 调整玻璃（30）的位置和组件的金属构件（28,32）的物理长度，以便为温度变化提供自我补偿。

公开(公告)号：WO1995006236A1

公开(公告)日：1995-03-02

申请号：PCT/US1994009302

申请日：1994-08-12

Applicant: SETRA SYSTEMS, INC.

Inventor： SETRA SYSTEMS, INC. ,  LEE, Shih-Ying

IPC: G01L07/08

CPC classification number: G01L9/0072

Abstract: A capacitive pressure sensor (10) includes a conductive diaphragm (20) positioned between two pneumatically separate chambers (60, 64). The diaphragm is supported at its periphery by a concave base member (30). An electrode assembly (40) establishes a substantially planar conductive surface (42a) opposite to, and spaced apart by a nominal gap from, the conductive diaphragm. The electrode assembly includes the conductive surface and a single support element (44) secured to, and extending through the base member. A glass dielectric (46) fixes the support element to a collar (48) which may be welded, brazed, or soldered to the base member. The glass dielectric provides both mechanical support and high quality electric insulation between the electrode and the housing. By prefabricating the electrode support element with the collar and securing the collar to the housing after the dielectric has cured, problems associated with thermal expansion are avoided and the dimension of the nominal gap may be precisely controlled at low cost.

Abstract translation: 电容式压力传感器（10）包括位于两个气动分离室（60,64）之间的导电隔膜（20）。 隔膜在其周边由凹入的基底构件（30）支撑。 电极组件（40）建立与导电隔膜相对且间隔开标称间隙的基本平坦的导电表面（42a）。 电极组件包括导电表面和固定到基底构件并延伸通过基底构件的单个支撑元件（44）。 玻璃电介质（46）将支撑元件固定到可以焊接，钎焊或焊接到基底构件的套环（48）上。 玻璃电介质在电极和壳体之间提供机械支撑和高质量的电绝缘。 通过在电介质固化之后预制电极支撑元件和套圈并将套环固定到壳体，避免了与热膨胀相关的问题，并且可以以低成本精确地控制标称间隙的尺寸。

公开(公告)号：WO1988007182A1

公开(公告)日：1988-09-22

申请号：PCT/US1988000704

申请日：1988-02-26

Applicant: SETRA SYSTEMS, INC.

Inventor： SETRA SYSTEMS, INC. ,  LEE, Shih-Ying

IPC: G01L01/14

CPC classification number: G01G21/24 ,  G01G7/06 ,  G01L1/142

Abstract: A compact force transducer (10) has at least one flexible beam (16, 18) mounted at one or both its ends to a force summing member (12, 14) or members. The force-to-be-measured is applied to the force summing member (12, 14) along a first axis (22) generally transverse to the beams to deform the beam elastically, without overstressing, through a displacement d. A sensor member (28, 30) carries a conductive surface (38) and is coupled to the beam member. In a parallelogram form, there are a parallel pair of beam members (16, 18) extending between two force summing members (12, 14) and a sensor member (28, 30) is secured to each beam member (16, 18) at or near its point of inflection. One sensor member (30) includes multiple arms (36, 36) that sandwich the other sensor member (28) to produce a linear, push-pull mode of operation. In alow cost cantilevered beam form, the sensor (28') is coupled to the beam (16') at the force summing member (14') in a parallel, spaced relationship. In a hybrid push-pull form, the transducer uses a two beam parallelogram construction with cantilevered sensors (28'', 30'') (1) coupled rigidly to each beam (16'', 18'') adjacent one force summing member (12'', 14'') with a hinge coupling (16''a, 18''a) between the beam and this one force summing member, and (2) extending generally in a parallel spaced relationship with respect to an associated one of the beams (16'', 18'').

公开(公告)号：EP1038161B1

公开(公告)日：2003-05-14

申请号：EP98958002.2

申请日：1998-11-16

Applicant: Setra Systems, Inc.

Inventor： LEE, Shih-Ying

IPC: G01L9/12 ,  G01L7/08 ,  G01L9/00

CPC classification number: G01L13/00 ,  G01L9/0072 ,  Y10T29/43

Abstract: A capacitive pressure transducer (110) includes a conductive diaphragm positioned between pneumatically separated chambers. The diaphragm is fixed and sealingly coupled at its periphery to the peripheral rim (116) of a concave body member. The diaphragm (140) is supported in tension by the peripheral rim (116) of a concave body member. An electrode assembly (150), supported by the body member (120, 130), establishes a substantially planar conductive surface opposite to and spaced apart by a nominal gap from the conductive diaphragm. The body member includes a yieldable portion that is adapted to radically expand its peripheral rim (116) in response to forces applied to the body member. When the forces are aplied, the body member becomes strained beyond its elastic limit and takes a permanent set whereby the peripheral rim (116) is expanded and the diaphragm becomes tensioned.

公开(公告)号：EP0500783B1

公开(公告)日：1996-10-16

申请号：EP91900581.9

申请日：1990-11-05

Applicant: SETRA SYSTEMS, INC.

Inventor： LEE, Shih-Ying

IPC: G01L9/12

CPC classification number: G01L9/0004 ,  A61M2205/3331 ,  G01L9/0002 ,  G01L9/0005

Abstract: A transducer measures the pressure of a fluid within a hollow conduit, typically one with a circular cross-section, having a central region that is deformed to a non-circular cross-section. This non-circular portion of the conduit displaces radially and repeatably without hysteresis in response to the pressure of the fluid in the conduit in a manner that corresponds to the pressure. A variable capacitor assembly (26), or a set of strain gauges (A, B, C, D) mounted on the exterior of the non-circular portion, produce an electrical signal proportional to the radial displacement or to the strain, respectively. In one capacitive form (26) a pair of electrodes (24) are mounted on opposite sides of the non-circular portion formed as free end portions of metallic sheet members with a central channel. In another capacitive form (26') electrodes (24') are mounted at one or both ends of lever arms which in turn are coupled to the non-circular portion with a set of flexure plates (34, 36) to produce a mechanical amplification of the radial displacement.

公开(公告)号：EP0741906A1

公开(公告)日：1996-11-13

申请号：EP95907484.0

申请日：1995-01-20

Applicant: SETRA SYSTEMS, INC.

Inventor： LEE, Shih-Ying

IPC: G01L1 ,  G01L9 ,  H01G5

CPC classification number: G01L9/0072

Abstract: A variable capacitance type pressure sensor (10) with excellent manufacturability center-mounts an electrode (20) on an edge-mounted diaphragm (16) using a metal-glass-metal subassembly (18). An inner metal post (28) of the assembly is welded to the diaphragm (16). A solder or flowable cement (36) secures the electrode (20) to an outer metal collar (32) of the assembly (18) with the initial diaphragm-to-electrode spacing (38) set by a temporary shim (40). The position of the glass (30) and the physical lengths of the metallic members (28, 32) of the assembly are adjusted to provide self-compensation for temperature variations.

公开(公告)号：EP0080493A1

公开(公告)日：1983-06-08

申请号：EP82901899.0

申请日：1982-05-11

Applicant: SETRA SYSTEMS INC.

Inventor： LEE, Shih-Ying

IPC: G01G21

CPC classification number: G01G21/244 ,  Y10T74/18992

Abstract: Assemblage de liaison (160, 300) contraignant un organe de reference (162, 302) a se deplacer le long d'un axe de reference (164, 306) avec un degre sensible de mouvement le long de cet axe tout en presentant une bonne resistance aux forces et aux moments lateraux ainsi qu'aux mouvements decales par rapport a l'axe. Dans une forme de realisation, l'assemblage de liaison comprend deux paires d'elements de flexion (168, 170 et 172, 174), chaque element de flexion ayant une partie extreme de sommet et au moins une partie extreme distale. Les elements de flexion de chaque paire sont connectes de telle sorte que leurs paires correspondantes des parties extremes distales soient couplees entre elles. Chacune des parties extremes distales couplees est connectee par un organe de liaison rigide (176, 178) sur la paire correspondante des parties extremes distales connectees de l'autre paire d'elements de flexion de sorte que la jonction des parties extremes distales de chaque paire couplee soit separee d'une distance predeterminee dans le sens de l'axe de reference. Les parties de sommet des elements de flexion correspondants de chaque paire sont connectees a l'organe de reference (162). Les deux parties de sommet couplees a l'organe de reference (162) sont separees de la distance predeterminee dans le sens de l'axe de reference (164). Les parties de sommet des autres elements de flexion sont connectees a l'organe de support en des points separes de la distance predeterminee dans le sens de l'axe de reference (164).

公开(公告)号：EP0714505B1

公开(公告)日：2001-02-28

申请号：EP94925923.8

申请日：1994-08-12

Applicant: SETRA SYSTEMS, INC.

Inventor： LEE, Shih-Ying

IPC: G01L7/08 ,  G01L7/12 ,  G01L9/12

CPC classification number: G01L9/0072

Abstract: A capacitive pressure sensor (10) includes a conductive diaphragm (20) positioned between two pneumatically separate chambers (60, 64). The diaphragm is supported at its periphery by a concave base member (30). An electrode assembly (40) establishes a substantially planar conductive surface (42a) opposite to, and spaced apart by a nominal gap from, the conductive diaphragm. The electrode assembly includes the conductive surface and a single support element (44) secured to, and extending through the base member. A glass dielectric (46) fixes the support element to a collar (48) which may be welded, brazed, or soldered to the base member. The glass dielectric provides both mechanical support and high quality electric insulation between the electrode and the housing. By prefabricating the electrode support element with the collar and securing the collar to the housing after the dielectric has cured, problems associated with thermal expansion are avoided and the dimension of the nominal gap may be precisely controlled at low cost.