1.
    发明专利
    未知

    公开(公告)号:DE69522165T2

    公开(公告)日:2002-05-02

    申请号:DE69522165

    申请日:1995-10-24

    Abstract: The micro-gyrometer is designed to detect rotation around a first direction (z). It includes a plate (1) which is orthogonal to the first direction, suspended w.r.t a fixed frame (8), and excited at its resonant frequency in a second direction (x) perpendicular to the first direction (z). Rotation around the direction (z) causes vibration of the plate in a third direction (y) orthogonal to the two others (x,z). The plate has teeth (9,10) extending in the second (x) and third (y) directions. These teeth engage without contact into slots (11,12) fixed to the frame (8). Each of the teeth supports a metal coatings, which form capacitors (Cx,Cy), w.r.t similar metal coatings on the slots (11,12).

    2.
    发明专利
    未知

    公开(公告)号:DE69522165D1

    公开(公告)日:2001-09-20

    申请号:DE69522165

    申请日:1995-10-24

    Abstract: The micro-gyrometer is designed to detect rotation around a first direction (z). It includes a plate (1) which is orthogonal to the first direction, suspended w.r.t a fixed frame (8), and excited at its resonant frequency in a second direction (x) perpendicular to the first direction (z). Rotation around the direction (z) causes vibration of the plate in a third direction (y) orthogonal to the two others (x,z). The plate has teeth (9,10) extending in the second (x) and third (y) directions. These teeth engage without contact into slots (11,12) fixed to the frame (8). Each of the teeth supports a metal coatings, which form capacitors (Cx,Cy), w.r.t similar metal coatings on the slots (11,12).

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