Abstract:
An ultrasound sensor element for use in a two dimensional array for ultrasonic imaging; the sensor element comprising a micro-electro-mechanical system (MEMS) transducer 102 for emitting and receiving an ultrasonic signal, a transmit circuit 104 to drive the ultrasound transmitters electrostatically and a receive circuit 106 to receive and amplify the reflected signal detected by the transducer. The transmit and receive circuits comprise at least one thin film transistor (TFT). The device may be flexible so that it can conform to the contours of a surface on which it is placed (such as a human patient) and it may have a display positioned on a non-emitting side of the array. The transmit and receive signals may be delayed so the array can be configured to undertake one-dimensional orthogonal beam steering and a scan may be performed using a sub-aperture of sensor elements that is then shifted across the array.