公开(公告)号：JP2004325431A

公开(公告)日：2004-11-18

申请号：JP2003308330

申请日：2003-09-01

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： HANABUSA NOBUHIRO ,  KAWADA MASARU ,  HARADA YOSHIHISA

IPC: G01N21/64 ,  G02B17/00 ,  G02B21/00

Abstract: PROBLEM TO BE SOLVED: To solve the problem caused by chromatic aberration, by increasing the degrees of freedom in the selection of an exciting wavelength and enhancing the detection sensitivity.
SOLUTION: The white light from a light source 2 is gathered to an exciting side spectroscope 4 by a concave mirror 6 and spectrally diffracted by the spectroscope 4 to turn into an exciting light with a predetermined wavelength. This exciting light is condensed by a Schwarz's mirror 8 to be formed into an image at a position 24. The exciting light formed into the image is condensed to a Schwarz's mirror 10 to be emitted to a half mirror 12 as parallel light. The exciting light is reflected by the half mirror 12 to be incident on a Schwarz's mirror 14 and the incident light is condensed to the predetermined region of a sample surface 16 by the Schwarz's mirror 14 to be allowed to irradiate. The fluorescence excited by the exciting light to be generated from the sample surface 16 is condensed by the same Schwarz's mirror 14 to transmit through the half mirror 12 as parallel light and the transmitted light is condensed by a Sshwarz's mirror 18 to be incident on a fluorescence side spectroscope 20. The fluorescence is spectrally diffracted by the spectroscope 20 to be detected by a detector 22.
COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JPH02287501A

公开(公告)日：1990-11-27

申请号：JP11094489

申请日：1989-04-28

Applicant: SHIMADZU CORP

Inventor： HARADA YOSHIHISA

IPC: G02B5/18 ,  G01M11/00 ,  G02B5/32 ,  G03H1/04

Abstract: PURPOSE:To improve the diffracted wave front accuracy of a grating by making bisected luminous flux incident on a plane grating in directions opposite its normal, and monitoring interference fringes formed with those pieces of diffracted light and adjusting the wave front accuracy. CONSTITUTION:The ready-made high-accuracy wave front type plane grating G of 1,200 grooves/mm is set on an exposure surface. The laser beam from an emitting means 1 is bisected by a beam splitter and the pieces of luminous flux which are split through spatial filters, off-axis parabolic mirrors PM, plane mirrors M1 - M5, etc., are made incident on the plane grating G in the directions opposite the normal of the grating. Then the interference fringes are formed with the primary diffracted light obtained from one of the two pieces of luminous flux and the secondary diffracted light from the other and monitored and the positions of the spatial filters SF and the rotation, and swing and tilt of the off-axis parabolic mirrors PM are adjusted still the interference fringes become linear. Thus, the plane grating is exposed actually to improve the wave front accuracy of a manufactured grating.

公开(公告)号：JPH01141324A

公开(公告)日：1989-06-02

申请号：JP30062987

申请日：1987-11-27

Applicant: SHIMADZU CORP

Inventor： KOIKE MASAHITO ,  HARADA YOSHIHISA

IPC: G01J3/18 ,  G02B5/18

Abstract: PURPOSE:To improve the accuracy by a simple structure by utilizing both slant faces, whose inclination angles are different from each other, of a triangular groove forming a grating, as a reflecting surface. CONSTITUTION:On the upper face of a substrate 1 made of glass for constituting an optical plane, a groove G consisting of slant faces 3, 4 which are opposed to each other, and also, whose inclination angles theta1, theta2 are different is formed by a photoresist. On the surfaces of both these slant faces 3, 4, light reflection films A1, A2 each are different in substance are formed. This diffraction grating body is supported so that it can be inverted freely by 180 deg. by a rotation axis which is projected vertically to the grating surface from the back of the substrate 1.

公开(公告)号：JP2005274459A

公开(公告)日：2005-10-06

申请号：JP2004090605

申请日：2004-03-25

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： TATENO AKIRA ,  HARADA YOSHIHISA ,  ARAI AKIHIRO

IPC: G01J3/18

Abstract: PROBLEM TO BE SOLVED: To provide an optical system of a spectroscope for spectrophotometers capable of condensing light to the axis of a telemeter mirror M3 in the spectroscope.
SOLUTION: The light emitted from a light source 1 is condensed with a concave mirror M1 to be led to a plane grating 3 after passing through an entrance slit 2 and via a collimator mirror M2, a second concave mirror, and is moreover condensed to a telemeter mirror M3, a third concave mirror, from the plane grating 3. Then, it is irradiated to a projection plane 5 after passing through an exit slit 4. Adopting the direction perpendicular to this projection plane 5 as the X-axis and the horizontal direction as the Y-axis, the slit aperture of entrance slit 2 is extended along the direction parallel to the X-axis. The collimator mirror M2 is composed from a toroidal mirror and the telemeter mirror M3 is composed from cylindrical mirrors or spherical mirrors. In the above configuration, distances between the collimator mirror M2 and the plane grating 3 and between the plane diffraction 3 and the telemeter mirror M3 are established to the specified values and then the light from the plane grating 3 is configured to be condensed to the axis of cylindrical mirror.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种用于分光光度计的光谱仪的光学系统，该分光光度计能够将光聚焦到分光镜中的远程计镜M3的轴线上。 解决方案：从光源1发射的光与凹面反射镜M1会聚，通过入射狭缝2并通过准直镜M2，第二凹面镜，并被引导到平面光栅3 从平面光栅3聚光到远摄计镜M3（第三凹面镜），然后在穿过出射狭缝4之后照射到投影平面5.采用垂直于该投影平面5的方向作为X轴 并且水平方向为Y轴，入口狭缝2的狭缝孔径沿着与X轴平行的方向延伸。 准直镜M2由环形反射镜组成，而测距镜M3由圆柱形镜或球面镜构成。 在上述结构中，将准直器反射镜M2与平面光栅3之间以及平面衍射3与远程计镜M3之间的距离设定为指定值，然后来自平面光栅3的光被配置为与轴 的圆柱镜。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2002013980A

公开(公告)日：2002-01-18

申请号：JP2000198105

申请日：2000-06-30

Applicant: SHIMADZU CORP

Inventor： HARADA YOSHIHISA ,  TATENO AKIRA ,  IKEDA YUICHIRO

IPC: G01J3/18

Abstract: PROBLEM TO BE SOLVED: To reduce loss of light due to astigmatism in an optical system of a spectroscope using a concave diffraction grating. SOLUTION: An illumination optical system A is composed of a light source 1, a concave spherical face mirror 2, and a convex cylindrical face mirror 3. An illumination optical system B is composed of an inlet slit 4, the concave diffraction grating 5, and an outlet slit 6. An original ray in the illumination optical system A is condensed at the inlet slit 3, and sagittal rays in the illumination optical systems A and B are condensed at the outlet slit 6. By this, astigmatic differences by astigmatisms produced in the illumination optical systems A and B are mutually reversed and counterbalanced and so a spot not affected by the astigmatisms can be obtained on a sample face 10. A bundle of rays inside a sagittal face is broadened by the convex cylindrical face mirror 3 and so the quantity of light passing the inlet slit 4 is increased.

公开(公告)号：JP2001223149A

公开(公告)日：2001-08-17

申请号：JP2000030633

申请日：2000-02-08

Applicant: SHIMADZU CORP

Inventor： HARADA YOSHIHISA

IPC: G02B5/18 ,  G03F7/20 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To provide a method for adjusting exposing device by which an optical system can be adjusted easily with high accuracy in a short time. SOLUTION: The arrangement and direction of the constituents of the optical system are adjusted so that the pattern of Moire fringes, which are generated due to the superposition of a reference groove pattern and the interference fringe pattern between two fluxes of laser light upon another on the lattice surface of a reference plate 18a having a reference surface on which the reference groove pattern is formed when the reference plate 18a is arranged on an exposed surface, may become coincident with the pattern of Moire fringes theoretically found from the design parameter of the optical system.

公开(公告)号：JP2000039359A

公开(公告)日：2000-02-08

申请号：JP20772298

申请日：1998-07-23

Applicant: JAPAN ATOMIC ENERGY RES INST ,  SHIMADZU CORP

Inventor： KOIKE MASAHITO ,  SANO KAZUO ,  HARADA YOSHIHISA

IPC: G01J3/18 ,  G02B5/18

Abstract: PROBLEM TO BE SOLVED: To perform an accurate spectrometry by deciding an expansion coefficient of a groove function of a series expansion formula indicating a groove pattern of a diffraction grating, so that a value of the expansion coefficient of an optical path function representing a focus of a spectral optical system containing the grating becomes substantially '0' in a wavelength within a wavelength range of wavelength scanning. SOLUTION: When a rotary angle θ of a diffraction grating 3 is '0', a light from an inlet slit 1 is reflected by a concave mirror 2 converted into a converged light, incident to a plane diffraction grating 3, diffracted, and focused at an outlet slit 4. A groove function constitutes a part of an optical path relation representing a distance from a point on the groove of the grating 3 to a focus F' of a diffracted light. Then, in order that a focal distance of the light becomes as constant as possible irrespective of a wavelength, the focal distance γ' and the expansion coefficient in the groove function are decided so that an expansion coefficient of the optical path function representing the focus becomes '0'.

公开(公告)号：JPH01277727A

公开(公告)日：1989-11-08

申请号：JP10794788

申请日：1988-04-30

Applicant: SHIMADZU CORP

Inventor： KOIKE MASAHITO ,  WATANABE MASAYUKI ,  HARADA YOSHIHISA ,  TAKAHATA SHIGEHIRO

IPC: G01J3/18

Abstract: PURPOSE:To accurately change over a diffraction grating, by fixing a plurality of the diffraction gratings of a diffraction grating spectroscope to one mount. CONSTITUTION:A diffraction grating mount 1 is guided by a slide guide 3 and moved in the direction vertical to a plane containing a slit 9 and an optical axis center 10 and three diffraction gratings 2 are mounted on said mount 1 in the moving direction thereof. The slide guide 3 is mounted to one end of the rotary motion shaft 4 supported in a rotatable manner by a support 8 through a bearing and a sign bar mechanism 5 for rotating the rotary motion shaft 4 is connected to the other end of said shaft 4. Therefore, when the rotary motion shaft 4 is rotated, the mount 1 (diffraction gratings 2) is also integrally rotated through the slide guide 3 to make it possible to perform wavelength scanning.

公开(公告)号：JP2006267537A

公开(公告)日：2006-10-05

申请号：JP2005085459

申请日：2005-03-24

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： HARADA YOSHIHISA

IPC: G02B5/18 ,  G02B1/10

Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method for a replica reflecting optical element with a protection film which has a high reflectivity over a wide wavelength range, especially, in the ultraviolet range. SOLUTION: After a vacuum vapor-deposition device coats a surface of an original diffraction grating 1 with a release agent 2, an LiF film 7, and an Al film 3 successively in order, a replica substrate 5 is fixed to the Al film 3 across resin 4. Lastly, the original diffraction grating 1 is separated at the location of the release agent 2 to obtain a replica diffraction grating 9 coated with the LiF film 7. The reflecting optical element with the LiF film 7 which is manufactured in this method is capable of preventing a reflecting surface of the Al film 3 from oxidizing during the vapor deposition, so the reflecting optical element has a high reflectivity over a wide wavelength range, especially, in the ultraviolet range. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 解决的问题：提供具有在宽波长范围内具有高反射率的保护膜的复制反射光学元件的制造方法，特别是在紫外线范围内。 解决方案：在真空气相沉积装置依次依次涂覆原始衍射光栅1的表面与脱模剂2，LiF膜7和Al膜3之后，将复制基板5固定在Al 最后，在脱模剂2的位置分离原始衍射光栅1，得到涂覆有LiF膜7的复制衍射光栅9.具有制造在LiF膜7中的LiF膜7的反射光学元件 该方法能够防止Al膜3的反射表面在气相沉积期间氧化，因此反射光学元件在宽波长范围内具有高反射率，特别是在紫外线范围内。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2003014631A

公开(公告)日：2003-01-15

申请号：JP2001201596

申请日：2001-07-03

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： TATENO AKIRA ,  HARADA YOSHIHISA ,  HONDA AKIRA

IPC: G01J3/08 ,  G01J3/42 ,  G01N21/31

Abstract: PROBLEM TO BE SOLVED: To reduce the loss of light in the optical system of an atomic absorption spectrophotometer.
SOLUTION: Luminous flux Ls on a sample side is condensed to an atomization part 8 by a toroidal mirror 4 and a plane mirror 5 and subsequently condensed to a chopper mirror 11 by a concave spherical mirror 9 and a plane mirror 10 while luminous flux Lr on a reference side is condensed to the chopper mirror 11 by a toroidal mirror 6 and a plane mirror 7. The convergent magnifications of both luminous fluxes are made equal by the chopper mirror 11. By this constitution, the loss of light in the chopper mirror 11 is reduced and the condensing efficiency to an inlet 14 is also enhanced. Since the changeover of both luminous fluxes accompanied by the rotation of the chopper mirror 11 is rapidly performed, a sampling time can be ensured long in a detection signal and an S/N ratio is enhanced.
COPYRIGHT: (C)2003,JPO

Abstract translation: 要解决的问题：为了减少原子吸收分光光度计的光学系统中的光的损失。 解决方案：样品侧的光通量Ls通过环形镜4和平面镜5被冷凝成雾化部分8，随后通过凹球面镜9和平面镜10被冷凝到斩光镜11，同时光通量Lr在 参考侧通过环形反射镜6和平面镜7与斩波反射镜11会聚。两个光束的会聚放大倍数由斩光镜11相等。通过这种结构，斩光镜11中的光的损失 并且对入口14的冷凝效率也得到提高。 由于伴随着斩波镜11的旋转的两个光通量的切换迅速进行，所以能够在检测信号中长时间地确保取样时间，并且提高S / N比。