公开(公告)号：US20030209069A1

公开(公告)日：2003-11-13

申请号：US10142795

申请日：2002-05-13

Applicant: SILICON INTEGRATED SYSTEMS CORP.

Inventor： Hsuan-Sheng Tung ,  Hsin-Ta Chien ,  Jui-Ping Li

IPC: G01F023/00

CPC classification number: H01L21/67086 ,  G01F23/0053 ,  G01F23/02 ,  G01F23/16 ,  G05D9/12 ,  H01L21/67057

Abstract: A chemical bath having liquid level indications in an outer trough is disclosed. The present invention adds an aqueduct in the outer bath of the chemical bath, and the chemical treatment liquid could flow into the aqueduct. According to the Pascal's law, the liquid level of the chemical treatment liquid in the aqueduct is the same with the liquid level of the chemical treatment liquid in the outer bath. Therefore, the level height of the chemical treatment liquid in the outer bath is observed from the transparent aqueduct by the naked eyes. The present invention abridges the complicated checkup steps, so that the producing time of apparatuses is increased and the amount of the wastes chemicals is decreased.

Abstract translation: 公开了一种在外槽中具有液位指示的化学浴。 本发明在化学浴的外槽中添加导水管，化学处理液可以流入导水管。 根据帕斯卡定律，导水管中化学处理液的液面与外槽中化学处理液的液位相同。 因此，通过肉眼从透明导水管观察外浴中的化学处理液的高度。 本发明克服了复杂的检查步骤，使得设备的生产时间增加，并且废物化学品的量减少。