公开(公告)号：US11946741B2

公开(公告)日：2024-04-02

申请号：US17605692

申请日：2020-05-07

Applicant: SILMACH

Inventor： Marc Sworowski ,  Charles Haye

IPC: G01B7/00 ,  B81B3/00 ,  G01B7/16

CPC classification number: G01B7/18 ,  B81B3/0086 ,  B81B2201/02 ,  B81B2203/04

Abstract: The present invention relates to a MEMS deformation sensor for measuring a relative movement between two regions of a structure, the sensor comprising: —a first portion (2) and a second portion (3) that are movable with respect to one another along a direction of measurement (X); —a thrust element (4) mounted fixed with respect to the first portion; —a first electrode (A) and a second electrode (B) that are capable of being raised to different electrical potentials, each mounted fixed with respect to the second portion; —a connecting portion (I) forming an electrical link between the first electrode and the second electrode, the thrust element applying a load to the connecting portion when the first portion moves with respect to the second portion along the direction of measurement beyond a predetermined distance, the electrical link being broken under the effect of the load.

公开(公告)号：US20240262680A1

公开(公告)日：2024-08-08

申请号：US18562689

申请日：2022-05-20

Applicant: SILMACH ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) ,  UNIVERSITE DE FRANCHE-COMTE

Inventor： Marc Sworowski ,  Cédric Vuillemin ,  Haythem AMEUR ,  Gilles BOURBON ,  Patrice LE MOAL

IPC: B81B7/00

CPC classification number: B81B7/008 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/0172 ,  B81B2203/056

Abstract: The invention relates to a method for controlling a microelectromechanical system by means of an electrical control signal alternating between a maximum voltage value (Vmax) and a minimum voltage value (Vmin), wherein, during the transition from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), the value of the voltage of the electrical control signal monotonously decreases from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), which signal comprising, in sequential order:



a first slope between the maximum voltage value (Vmax) and a first voltage threshold value (Vend),
a second slope, having a lower absolute value than the first slope, between the first voltage threshold value (Vend) and a second voltage threshold value (Vstart), and
a third slope, having a higher absolute value than the second slope, between the second voltage threshold value (Vstart) and the minimum voltage value (Vmin).