公开(公告)号：AT409847T

公开(公告)日：2008-10-15

申请号：AT00910193

申请日：2000-02-15

Applicant: SMC KK

Inventor： HARRIS JAMES ,  TAHERI BABAK ,  ARKILIC ERROL

IPC: G01D3/028 ,  G01D18/00 ,  G01L19/04 ,  G01L27/00

Abstract: A method of correcting drift in a sensor includes the step of identifying a calibration command. A nominal zero pressure sensor drift correction factor for the sensor is identified by relying upon a calibration voltage value and a calibration temperature value secured at a nominal zero pressure condition. Sensor output is subsequently adjusted according to the nominal zero pressure sensor drift correction factor.

公开(公告)号：AT478930T

公开(公告)日：2010-09-15

申请号：AT01909072

申请日：2001-02-12

Applicant: SMC KK

Inventor： HARRIS JAMES ,  SELSER MICHAEL ,  WEBER WALTER

IPC: B81C3/00 ,  C09J5/00 ,  B81B7/00 ,  B81B7/02 ,  F15C5/00 ,  F16K99/00 ,  H01L23/10

Abstract: A method of attaching a micromechanical fluid control device to a substrate includes the steps of forming a first ring of a first adhesive around an aperture defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between the micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive is applied around the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.