METHOD AND APPARATUS FOR GENERATING LASER BEAM

    公开(公告)号:JPH11251666A

    公开(公告)日:1999-09-17

    申请号:JP5227198

    申请日:1998-03-04

    Applicant: SONY CORP

    Inventor: KANEDA YUJI

    Abstract: PROBLEM TO BE SOLVED: To obtain a laser beam having an exchangeability with a preceding Ar fluoride laser and a useful specified wavelength as a short-wavelength laser beam, by combining laser beams having specified wavelengths. SOLUTION: A wavelength converter element 2 converts a laser beam a of 946 nm in wavelength from a laser light source 1 composed of an Nd:YAG laser, etc., into a laser beam b of 473 nm in wavelength. The laser beam b from a first SHG process block 16 is incident on a second SHG process block 17, a second harmonics generator block converts the laser beam b of 473 nm in wavelength into a laser beam e of 236 nm in wavelength. The laser beam e of 236 nm in wavelength from the second SHG process block 17 is fed into a laser resonator of 1047-1064 nm in wavelength shown in a sum frequency mixing process 18, using a wavelength dispersion prism 10, etc. The laser medium 13 uses an Nd:YAG laser, Nd:YLF laser, etc.

    LASER GENERATOR
    2.
    发明专利

    公开(公告)号:JPH1115034A

    公开(公告)日:1999-01-22

    申请号:JP16902697

    申请日:1997-06-25

    Applicant: SONY CORP

    Inventor: KANEDA YUJI

    Abstract: PROBLEM TO BE SOLVED: To prevent 3rd higher harmonic light from generating when boric- oxide-cesium-lithium(CLBO) crystal is used as a non-linear optical element for a 4th higher harmonics generation means, by arranging a polarization adjustment means in a light path coupling an optical output end of a 2nd harmonics generation means to an optical input end of a 4th higher harmonics generation means. SOLUTION: A 2nd higher harmonic light emitted from a 2nd higher harmonics generator 2 and remaining fundamental wave light are made incident to a wave plate 5 as a polarization adjustment means. The wave plate 5 rotates the polarization plane of the 2nd harmonic light to make the polarization plane coincide with that of the fundamental wave light. Then, the 2nd higher harmonic light having the same polarization plane as the fundamental wave light is made incident to a 4th higher harmonic generator 3. The 4th higher harmonic generator 3 uses high conversion efficiency CLBO. In an optical path between the 4th higher harmonic generator and a 5th higher harmonic generator 4, a wave plate 6 is arranged which has a similar function as the wave plate 5. The 4th higher harmonic light having the same polarization plane as the fundamental wave light is made incident to the 5th higher harmonic generator.

    TWO WAVELENGTH RESONATOR AND LASER BEAM GENERATOR

    公开(公告)号:JPH09292639A

    公开(公告)日:1997-11-11

    申请号:JP10818996

    申请日:1996-04-26

    Applicant: SONY CORP

    Inventor: KANEDA YUJI

    Abstract: PROBLEM TO BE SOLVED: To improve the efficiency of a nonlinear conversion by optimizing the reflectivity of an input coupling mirror. SOLUTION: A laser beam having a first waveform to be made incident from a first laser beam source 1 and a laser beam having a second wavelength to be made incident from a second laser beam source 2 are inputted to a two wavelength resonator 5 provided with an input coupling mirror M1 having the reflectivity of not larger than a reflecivity with which an impedance matching is attained with respect to respective input light beams having respective wavelengths. A nonlinear optical crystalline element 50 is arranged in the inside of the two wavelength resonator 5 and the element generates the continuous wave laser beam of third wavelengths having a sum frequency and a difference frequency while resonating two kinds of inputted laser beams having different wavelengths simultaneously.

    SEMICONDUCTOR ALIGNER, PROJECTION ALIGNER AND FORMATION OF CIRCUIT PATTERN

    公开(公告)号:JPH09162104A

    公开(公告)日:1997-06-20

    申请号:JP32055795

    申请日:1995-12-08

    Abstract: PROBLEM TO BE SOLVED: To prevent speckle noise by subjecting a basic wave laser light to phase modulation with a voltage signal having a plurality of frequency components, converting the wavelength thereof into the wavelength of ultraviolet rays, producing an optical path difference from a uniform illuminator and projecting a pattern onto a substrate thereby reducing the coherence of laser light. SOLUTION: Basic wave laser light from an Nd:YAG Q switch laser unit 2 enters a phase modulator 1 and subjected to phase modulation depending on a voltage signal amplified through a high frequency amplifier 5 thus widening the overall spectral width of basic wave laser light. The laser light is delivered to a wavelength converter 3 where spectral width of ultraviolet laser light is widened several times. The laser light is then split through a prism 6 into respective wavelength components and only a specified laser light is transmitted through a slit to a uniform illuminator 7. The laser light is split to set an optical path difference before being recombined thus producing a uniform light having low coherence and generating no speckle noise.

    LASER LIGHT GENERATOR
    5.
    发明专利

    公开(公告)号:JPH04241484A

    公开(公告)日:1992-08-28

    申请号:JP1579091

    申请日:1991-01-16

    Applicant: SONY CORP

    Abstract: PURPOSE:To generate laser light with much energy concentrated in a narrow divergence angle. CONSTITUTION:Pumping laser light output from a plurality of laser diodes 1a to 1d is applied to different positions of a laser medium 6. Thus heat lenses 6a to 6d are formed in the laser medium 6. Four laser light beams generated from the laser medium 6 are input to a non-linear optical crystal element, 9. Second harmonics of the same phase are generated from the nonlinear optical crystal element 9.

    END FACE EXCITING TYPE SOLID STATE LASER OSCILLATOR

    公开(公告)号:JPH0485978A

    公开(公告)日:1992-03-18

    申请号:JP20204990

    申请日:1990-07-30

    Applicant: SONY CORP

    Abstract: PURPOSE:To make heat generating in an optical axis direction of a laser rod uniform and to enhance its output by focusing a pumping light from an exciting light source by a condensing optical element having large wavelength divergence, and emitting the end face of the rod with it. CONSTITUTION:A laser oscillator has a resonator RS made of a pair of mirrors 5, 6 and a laser rod 7 arranged therebetween, exciting light sources 1, 2 for generating pumping lights for exciting the rod 7, and a condensing optical element 4 having large wavelength divergence for focusing the lights from the sources 1, 2 to emit the end face of the rod 7 therewith. Since the lights are focused upon emitting at focal points at different positions on an optical axis in the rod 7 in response to a difference of the wavelengths of the lights, generated heat of the rod 7 in the optical axis direction is made uniform.

    LASER BEAM GENERATING DEVICE
    7.
    发明专利

    公开(公告)号:JP2000352731A

    公开(公告)日:2000-12-19

    申请号:JP16269699

    申请日:1999-06-09

    Applicant: SONY CORP

    Inventor: KANEDA YUJI

    Abstract: PROBLEM TO BE SOLVED: To provide a laser beam generating device capable of obtaining a short wavelength light source in which a noise is little and which is an efficient and constant continuous wave. SOLUTION: An error signal (e) which is to be used for performing the resonance control of a second harmonic 2f0 by using an optical resonator 4 having a second harmonic generating medium 7 generating the second harmonic 2f0 of a fundamental wave f0 entering from a fundamental wave laser beam source 1 is made to be obtained by applying a phase modulation to the fundamental wave f0 with a fixed frequency from a signal generator 3 and also by detecting the phase of the same frequency component of the second harmonic 2f0 which is to be leaked to the outside from the resonator 4. The controlling of a resonance which is a continuous wave and is constant is performed by feeding back this error signal to the frequency control means of the laser beam source 1.

    WAVELENGTH CONVERTING DEVICE
    8.
    发明专利

    公开(公告)号:JPH1164902A

    公开(公告)日:1999-03-05

    申请号:JP22354897

    申请日:1997-08-20

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To provide a wavelength converting device preventing dust and gaseous components occurring due to short wavelength laser beam from depositing onto a wavelength converting element and a mirror surface, suppressing angular deviation and positional deviation in the element and mirror and oscillating the stable laser beam for a long term. SOLUTION: In the external resonant type wavelength converting device having the wavelength converting element 1a and a laser beam separation element 6, optically transparent substance 2 is provided between the wavelength converting element 1a and the laser beam separation element 6, and the wavelength converting element 1a and the light receiving surface side of the laser light separation element 6 are stuck/integrated to the optically transparent substance 2 so as to be interrupted respectively from the outside.

    EXCITING METHOD FOR SOLID-STATE LASER

    公开(公告)号:JPH07288353A

    公开(公告)日:1995-10-31

    申请号:JP7897094

    申请日:1994-04-18

    Applicant: SONY CORP

    Inventor: KANEDA YUJI

    Abstract: PURPOSE:To prevent oscillation in a higher-order mode or undesired resonator mode and allows oscillation only in a desired mode when exciting a solid-state laser using a fiber bundle, or a plurality of spatially distributed exciting light sources. CONSTITUTION:The exciting light intensity of the exciting light source connected with the optical fiber 11 positioned at the center of a fiber bundle 2, is made higher than that of the exciting light sources connected with optical fibers 12 positioned in the outer area in the fiber bundle.

    LASER OSCILLATOR
    10.
    发明专利

    公开(公告)号:JPH05152668A

    公开(公告)日:1993-06-18

    申请号:JP31505091

    申请日:1991-11-28

    Applicant: SONY CORP

    Inventor: KANEDA YUJI

    Abstract: PURPOSE:To manufacture the title laser oscillator in high conversion efficiency regardless of compact size and wider range of wavelength selection of the prospective oscillating wire. CONSTITUTION:A photoparametric medium C1 and a laser medium L1 are arranged between laser resonators M1 and M2 so that the wavelength of one beams out of signal waves and idler waves raised from the photoparametric medium C1 when it is excited may coincide with the wavelength of one beams out of one oscillating wire raised from the laser medium L1 when it is excited.

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