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公开(公告)号：DE69106447D1
公开(公告)日：1995-02-16
申请号：DE69106447
申请日：1991-07-30
Applicant: SONY CORP
Inventor： KUBOTA SHIGEO , KANEDA YUSHI
IPC: H01S3/08 , H01S3/094 , H01S3/0941 , H01S5/40
Abstract: An end pumped solid-state laser is comprised of a resonator (RS) formed of a pair of mirrors (5, 6) and a laser rod (7) disposed between the pair of mirrors (5, 6), an exciting light source (1) for generating a pumping light which excites the laser rod (7) and a converging optical element (4) for converging the pumping light from the exciting light source (1) so that the converged pumping light is irradiated on an end face of the laser rod (7). The wavelength of the light generated from the exciting light source (1) is widened in band and/or a converging optical element (4) having a large wavelength dispersion is employed, whereby heat generation in the optical axis direction of the laser rod (7) is uniformed so as to generate a laser beam of large power.
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公开(公告)号：DE69201257D1
公开(公告)日：1995-03-09
申请号：DE69201257
申请日：1992-04-08
Applicant: SONY CORP
Inventor： MASUDA HISASHI , KANEDA YUSHI
Abstract: A laser beam generating apparatus which is easy to manufacture and simple in adjusting operation. The laser beam generating apparatus comprises a light source (1) having a narrow active layer for generating pumping laser beam, a laser medium (5) for receiving the pumping laser beam to form a heat lens (5a) therein and generate fundamental wave laser beam, a non-linear optical crystal element (6) having a face (6a) inclined with respect to an optical axis (LA1) of the fundamental wave laser beam for receiving the fundamental wave laser beam to generate secondary harmonic laser beam, a quater wavelength plate (4) for suppressing coupling between two polarization modes of the fundamental wave laser beam, and a pair of planar reflecting means (11, 12) for reflecting the fundamental wave laser beam back into the laser medium (5). The laser medium (5), non-linear optical crystal element (6), quarter length plate (4) and planar reflecting means (11, 12) cooperate to constitute a light resonator (9). The optical axis (LA2) of the pumping laser beam is adjusted in a direction perpendicular to the optical axis (LA1).
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公开(公告)号：DE69201257T2
公开(公告)日：1995-08-10
申请号：DE69201257
申请日：1992-04-08
Applicant: SONY CORP
Inventor： MASUDA HISASHI , KANEDA YUSHI
Abstract: A laser beam generating apparatus which is easy to manufacture and simple in adjusting operation. The laser beam generating apparatus comprises a light source (1) having a narrow active layer for generating pumping laser beam, a laser medium (5) for receiving the pumping laser beam to form a heat lens (5a) therein and generate fundamental wave laser beam, a non-linear optical crystal element (6) having a face (6a) inclined with respect to an optical axis (LA1) of the fundamental wave laser beam for receiving the fundamental wave laser beam to generate secondary harmonic laser beam, a quater wavelength plate (4) for suppressing coupling between two polarization modes of the fundamental wave laser beam, and a pair of planar reflecting means (11, 12) for reflecting the fundamental wave laser beam back into the laser medium (5). The laser medium (5), non-linear optical crystal element (6), quarter length plate (4) and planar reflecting means (11, 12) cooperate to constitute a light resonator (9). The optical axis (LA2) of the pumping laser beam is adjusted in a direction perpendicular to the optical axis (LA1).
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公开(公告)号：DE69106447T2
公开(公告)日：1995-05-11
申请号：DE69106447
申请日：1991-07-30
Applicant: SONY CORP
Inventor： KUBOTA SHIGEO , KANEDA YUSHI
IPC: H01S3/08 , H01S3/094 , H01S3/0941 , H01S5/40
Abstract: An end pumped solid-state laser is comprised of a resonator (RS) formed of a pair of mirrors (5, 6) and a laser rod (7) disposed between the pair of mirrors (5, 6), an exciting light source (1) for generating a pumping light which excites the laser rod (7) and a converging optical element (4) for converging the pumping light from the exciting light source (1) so that the converged pumping light is irradiated on an end face of the laser rod (7). The wavelength of the light generated from the exciting light source (1) is widened in band and/or a converging optical element (4) having a large wavelength dispersion is employed, whereby heat generation in the optical axis direction of the laser rod (7) is uniformed so as to generate a laser beam of large power.
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公开(公告)号：DE69107445D1
公开(公告)日：1995-03-23
申请号：DE69107445
申请日：1991-12-18
Applicant: SONY CORP
Inventor： KANEDA YUSHI
Abstract: A laser beam generator which includes an excitation light source (1) for generating a plurality of excitation optical beams, a laser medium (7) for generating at least two laser beams in response to irradiation with a plurality of excitation optical beams in different positions, reflection means (8) for reflecting part of the laser beams generated by the laser medium (7), constituting a laser resonator (5) in cooperation with heat lenses (7a) -(7d) formed inside the laser medium (7), and phase compensation means (9) for compensating for the phases of the laser beams outputted from the laser resonator (5). This generator can generate a laser beam having a small angle of divergence and a high energy density. The laser beam can be subjected to tracking control by changing the phase compensation quantity.
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Patent Agency Ranking
公开(公告)号：EP0778498A3
公开(公告)日：1998-05-06
申请号：EP96119640
申请日：1996-12-06
Applicant: SONY CORP , NIPPON KOGAKU KK
Inventor： KIKUCHI HIROKI , KANEDA YUSHI , HAMATANI MASATO
IPC: G03F7/20 , H01L21/027 , H01S3/10 , H01S3/109 , H01S3/11
CPC classification number: G03F7/70575 , G03F7/70091 , G03F7/70208 , G03F7/70583
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公开(公告)号：DE60133862D1
公开(公告)日：2008-06-19
申请号：DE60133862
申请日：2001-08-02
Applicant: SONY CORP
Inventor： KANEDA YUSHI
Abstract: A deep-ultraviolet violet laser beam which is a harmonic and is generated inside a nonlinear optical element (101) is emitted outside the nonlinear optical element (101), being spaced from a green laser beam, which is a fundamental wave. The green laser beam emitted outside the nonlinear optical element (101) is reflected by an input-coupling mirror (102) and applied again into the nonlinear optical element (101) in order to form a closed optical path for the fundamental wave. Also, the deep-ultraviolet laser beam emitted outside the nonlinear optical element (101) is reflected by a reflecting mirror (28) other than the input-coupling mirror (102) in order to emit the deep-ultraviolet laser beam from a deep-ultraviolet laser beam-generating section (20).
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公开(公告)号：DE69107445T2
公开(公告)日：1995-06-22
申请号：DE69107445
申请日：1991-12-18
Applicant: SONY CORP
Inventor： KANEDA YUSHI
Abstract: A laser beam generator which includes an excitation light source (1) for generating a plurality of excitation optical beams, a laser medium (7) for generating at least two laser beams in response to irradiation with a plurality of excitation optical beams in different positions, reflection means (8) for reflecting part of the laser beams generated by the laser medium (7), constituting a laser resonator (5) in cooperation with heat lenses (7a) -(7d) formed inside the laser medium (7), and phase compensation means (9) for compensating for the phases of the laser beams outputted from the laser resonator (5). This generator can generate a laser beam having a small angle of divergence and a high energy density. The laser beam can be subjected to tracking control by changing the phase compensation quantity.
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公开(公告)号：AU659270B2
公开(公告)日：1995-05-11
申请号：AU3287593
申请日：1993-02-08
Applicant: SONY CORP
Inventor： MASUDA HISASHI , KANEDA YUSHI
Abstract: The apparatus includes a laser diode (11) a laser medium (17), a non-linear optical crystal element (18), reflecting mirrors (16,19), a deflecting mirror (22), a temperature-control device (24) and a case (31). The laser diode emits at least one pumping laser light beam. The laser medium is excited by the pumping laser light beam from the laser diode. The non-linear optical crystal element is arranged in the ouputted light path of the pumping laser light beam from the laser diode. The reflecting mirrors constitute a resonator (20) with the laser medium and the non-linear optical crystal element. The deflecting mirror deflects the light path of the light beam from the resonator. The temperature-control device controls the temperature of the laser diode and the resonator. The case (31) houses the laser diode, the laser medium, the non-linear optical crystal element, the reflecting mirrors, the deflecting mirror, the temperature-control device.
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公开(公告)号：DE69622513T2
公开(公告)日：2003-02-20
申请号：DE69622513
申请日：1996-12-06
Applicant: SONY CORP
Inventor： KIKUCHI HIROKI , KANEDA YUSHI , HAMATANI MASATO
IPC: G03F7/20 , H01L21/027 , H01S3/10 , H01S3/109 , H01S3/11
Abstract: A semiconductor light exposure device reducing coherency of laser light to an appropriate value by a simplified structure without producing speckles. The semiconductor light exposure device includes an ultraviolet light generating device, a uniform illumination device having the operation of inducing an optical path length difference and a projection device for projecting the laser light from the uniform illumination device. The ultraviolet light generating device includes an Nd:YAG Q-switch laser unit with a wavelength of 1064 nm, oscillated with a longitudinal single mode, a phase modulation unit or phase-modulating the fundamental laser light outgoing from the Nd:YAG Q-switch laser unit with voltage signals having plural frequency components, and a wavelength conversion unit for converting the wavelength of the fundamental laser light phase-modulated by the phase modulation unit into an ultraviolet laser light with a wavelength of 213 nm as a fifth harmonics.
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