公开(公告)号：FR2750788B1

公开(公告)日：1999-11-26

申请号：FR9708265

申请日：1997-07-01

Applicant: SONY CORP

Inventor： IKEDA ETSURO ,  SUZUKI ITARU ,  KAWANA YUGI

IPC: C23C14/34 ,  C23C14/04 ,  C23C14/50 ,  G11B7/26 ,  G11B11/10 ,  G11B11/105

Abstract: A DC sputtering system improved in prevention of fusion of a substrate and electric corrosion of a pallet revolving shaft due to the flow of negative electric charges at the time of production of an optical disk. The system includes a pair of electrodes, a negative electrode and a positive electrode, wherein the negative electrode is composed of a target plate made from a target material such as Si and a backing plate on which the target plate is fixedly placed, and the positive electrode is composed of a pallet disposed opposite to the negative electrode. A substrate of an optical disk is mounted on the positive electrode side through a disk base using an inner peripheral mask and an outer peripheral mask. Each of the inner peripheral mask and the outer peripheral mask is made from or covered with an electrically insulating material such as teflon or ceramic. This prevents the flow of negative electric chargers from being concentrated at the inner peripheral mask and the outer peripheral mask, to thereby protect the substrate from being fused.

公开(公告)号：FR2750788A1

公开(公告)日：1998-01-09

申请号：FR9708265

申请日：1997-07-01

Applicant: SONY CORP

Inventor： IKEDA ETSURO ,  SUZUKI ITARU ,  KAWANA YUGI

IPC: C23C14/34 ,  C23C14/04 ,  C23C14/50 ,  G11B7/26 ,  G11B11/10 ,  G11B11/105

Abstract: The equipment operates using a mask (12,13) which is fixed over the substrate (11) forming the base of the optical disc and to a plate (6). The mask is made of an electrically insulating material, preferably a ceramic or high polymer material or is covered with one of these materials. The plate (6) that supports the substrate carries a support (15) that attaches to the plate and a disc base (14) mounts the substrate on the plate. The plate and the disc base are also electrically insulated.