SEMICONDUCTOR DEVICE, MANUFACTURING METHOD AND MANUFACTURING APPARATUS

    公开(公告)号:JPH06244316A

    公开(公告)日:1994-09-02

    申请号:JP5481493

    申请日:1993-02-19

    Applicant: SONY CORP

    Abstract: PURPOSE:To maintain moistureproofness and humidity resistance and to prevent crack in a semiconductor package by applying a humidity resistant polymer thin film of a specific thickness by plasma polymerization uniformly and homogeneously on the semiconductor and attaining the adhesion of the uniform and the package surface. CONSTITUTION:Concerning a semiconductor package 30, a humidity resistant or moistureproof polymer thin film is uniformly and heterogeneously coated on the surface except the soldered part 17a of the outer lead part 17 by plasma polymerization. The thickness of the polymer thin film 39 is as thin as 10 to 500nm. Such a very thin film can be only attained by plasma polymerization. But when the thickness is thinner than 10nm, the moistureproofness is not satisfactory, and when the thickness exceeds 500nm, the productivity deteriorates and the polymer film thickness at the border between the masking tape and the leads becomes too thick. The thickness is preferable to be in a range between 10 and 50nm.

    2.
    发明专利
    失效

    公开(公告)号:JPH05339379A

    公开(公告)日:1993-12-21

    申请号:JP15097892

    申请日:1992-06-10

    Applicant: SONY CORP

    Abstract: PURPOSE:To obtain the title material improved in conductivity and excellent in mechanical strength and chemical resistance by the joint vapor deposition or plasma polymerization of an electron acceptor and an electron donor. CONSTITUTION:The title material is obtained by the joint vapor deposition or plasma polymerization of an-electron acceptor of formula I [wherein R1 is a group of formula IV or 0-(a group of formula IV) (wherein m is 0 to 12), or F; and R is a group of formula V or 0-(a group of formula V) (wherein n is 0 to 12), or F] and an electron donor of formula 11 [wherein X is S, Se or Te; R is a group of formula VI or Y -(a group of formula VI) (wherein j is 0 to 12; and Y is 0, S, Se or Te); and R is a group of formula VII or Y -(a group of formula VII) (wherein k is 0 to 12; and Y is O, S, Se or Te)] or formula III (wherein X is S, Se or Te).

    PRODUCTION OF PLASMA-POLYMERIZED FILM AND PLASMA POLYMERIZATION APPARATUS

    公开(公告)号:JPH04331203A

    公开(公告)日:1992-11-19

    申请号:JP12842891

    申请日:1991-05-01

    Applicant: SONY CORP

    Abstract: PURPOSE:To provide a process and an apparatus for producing a plasma- polymerized film of good quality without decreasing the rate of film formation and injuring the surface of a substrate or of the plasma-polymerized film and to produce a plasma-polymerized film excellent in especially water vapor barrier properties, while preventing the formation of double bonds due to recombination of residual radicals and the formation of polar groups due to oxidation both of which occur especially when the plasma-polymerized film is withdrawn into air after polymerization. CONSTITUTION:An excited monomer gas generated by plasma generation sources 4 and 6 is led toward the direction of a substrate 12 set in the polymerization apparatus along a guide cylinder 18 provided around the periphery of plasma generation sources 4 and 6 to form a plasma-polymerized film on the surface of the substrate 12. After a plasma-polymerized film is formed on the surface of a substrate in a sealed container 8, a hydrogen gas is fed to the sealed container to replace the atmosphere in the container by a hydrogen gas atmosphere, and the substrate on which a plasma-polymerized film is formed is withdrawn from the container after a given time.

    SEMICONDUCTOR DEVICE, MANUFACTURE THEREOF, AND SEMICONDUCTOR DEVICE MOUNT TRAY FOR USE IN THE MANUFACTURE

    公开(公告)号:JPH04365360A

    公开(公告)日:1992-12-17

    申请号:JP16878191

    申请日:1991-06-12

    Applicant: SONY CORP

    Abstract: PURPOSE:To enhance a humid-proof characteristic of a package by a method wherein the surface of the package composed of resins is coated with a humid- proof resin film. CONSTITUTION:The surface of a package 7 composed of resins is coated with a humid-proof characteristic resin film 8. That is, a semiconductor is mounted on a semiconductor device mount tray within a chamber for coating to supply gaseous humid-proof resins to a coating chamber, whereby the surface of the package 7 composed of the resins is coated with the humid-proof characteristic resin film 8. Thus, a humid-proof characteristic of the package 7 rises, and a time capable of mounting the semiconductor device under a normal temperature and a normal humidity can be prolonged while the package is unpacked and mounted. Moreover, reliability for a long interval after mounted is enhanced.

    PLASMA-POLYMERIZED FILM
    6.
    发明专利

    公开(公告)号:JPH03177433A

    公开(公告)日:1991-08-01

    申请号:JP31429089

    申请日:1989-12-05

    Applicant: SONY CORP

    Abstract: PURPOSE:To provide the subject polymerized film composed of a polymerized fluoromonomer film having an oxygen/carbon atomic ratio falling within a specific range, having excellent barrierness to moisture transmission, faint color and excellent transparency and useful for the surface-protection of magneto- optical disk, etc. CONSTITUTION:The objective polymerized film has an O/C atomic ratio (ratio of oxygen to carbon in the polymerized film of fluoromonomer) of 0.0175-0.05 (preferably 0.03-0.04) and preferably has an F/C ratio of >=1.15.

    OPTICAL INFORMATION RECORDING MEDIUM

    公开(公告)号:JPH02172037A

    公开(公告)日:1990-07-03

    申请号:JP32375588

    申请日:1988-12-23

    Applicant: SONY CORP

    Abstract: PURPOSE:To obtain excellent long-term reliability by forming a specific polymer film as a protective film. CONSTITUTION:A dielectric layer 2 consisting of Si3N4, etc., a recording film 3, a reflecting film 4 consisting of Al, etc., and further a dielectric layer 5 which protects the films 3, 4 by covering the side surfaces thereof are successively laminated on a substrate 1 consisting of polycarbonate, etc., and the circumference thereof is fully coated with the polymer film 6 consisting of chlorinated paraxylene. The thickness of the film 6 is

    STEAM SENSOR
    8.
    发明专利

    公开(公告)号:JPH0772108A

    公开(公告)日:1995-03-17

    申请号:JP21677193

    申请日:1993-08-31

    Applicant: SONY CORP

    Abstract: PURPOSE:To make a steam sensor possible to fast respond to changes in the amount of steam even in a low humidity area by using a plasma polymerization film made of spheroidal carbons (fullerene) as detector. CONSTITUTION:A plasma polymerization film made of spheroidal carbons used for a detector is an organic semiconductive thin film which is made of a compound as given by a formula of Cn (n: integer allowing the formation of a spheroidal compound geometrically) or (Cn+j) m (n: as mentioned above, j: integer of -10-10, m: positive integer). The compound has a structure in which a plurality of spheroidal carbons are polymerized by 1, 2-cycle bond added to a cyclohexatrienyl site and in the thin film, the structure is distributed in an amorphous state. The plasma polymerization film made of the spheroidal carbons is low in conductivity in the environment where no steam exists. When the steam exists, the conductivity increases 100,000 times at its maximum. The film has quick susceptibility with a high sensitivity.

    CONDUCTOR AND PRODUCTION THEREOF
    9.
    发明专利

    公开(公告)号:JPH05222515A

    公开(公告)日:1993-08-31

    申请号:JP12678391

    申请日:1991-04-30

    Applicant: SONY CORP

    Inventor: TAKAHASHI NOBORU

    Abstract: PURPOSE:To provide the conductor which is not deteriorated on its surface in spite of long-term resting and by which a stable electrical conductivity is obtd. and the process for production thereof. CONSTITUTION:This conductor 2 is constituted by forming a reforming layer 9 contg. a halogen element at about a film thickness at which the electrical conductivity is obtd. on the surface of the conductive oxidative metal 6 of the conductor on at least the front surface side of which the oxidative metal 6 exists. The process for production of the conductor consists in subjecting the conductor on at least the front surface side of which the conductive oxidative metal 6 exists to a plasma treatment in an oxygen atmosphere, then in an atmosphere of a gaseous mixture composed of oxygen and gaseous halogen, thereby forming the reforming layer 9 contg. the halogen element on the surface of the oxidative metal 6.

    MAGNETIC RECORDING MEDIUM AND ITS MANUFACTURE

    公开(公告)号:JPH05205246A

    公开(公告)日:1993-08-13

    申请号:JP3257192

    申请日:1992-01-23

    Applicant: SONY CORP

    Abstract: PURPOSE:To achieve improved running property and wear resistance property by coating a lubricant with a polar group on a medium surface which is treated in an inactive gas plasma atmosphere. CONSTITUTION:A metal magnetic thin film 2 is formed on a non-magnetic support 1 through a ground layer when needed and further the thin-film surface is subjected to plasma treatment and then coated with a lubricant 3. Namely, after the medium surface is exposed to inactive gas plasma atmosphere, it is coated with a lubricant with a polar group which has a group being selected from the group of-COO-,-COS-,-SO3-, and-COOH, thus improving absorption force for the surface of a magnetic recording medium of a lubricant molecule and achieving an improved running property and wear resistance property.

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