公开(公告)号：DE60333885D1

公开(公告)日：2010-10-07

申请号：DE60333885

申请日：2003-04-09

Applicant: SONY CORP

Inventor： MIYAMOTO TAKAAKI ,  TOMITA MANABU ,  ONO SHOGO ,  KOHNO MINORU ,  TATEISHI OSAMU

IPC: B41J2/05 ,  B41J2/14 ,  B41J2/16

公开(公告)号：EP1661706A4

公开(公告)日：2008-09-10

申请号：EP04772196

申请日：2004-08-19

Applicant: SONY CORP

Inventor： MIYAMOTO TAKAAKI ,  KOHNO MINORU ,  TATEISHI OSAMU

IPC: B41J2/05 ,  B41J2/14 ,  B41J2/16

CPC classification number: B41J2/14129 ,  B41J2/14072 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/13

Abstract: A liquid ejection head, a liquid ejector and a process for manufacturing a liquid ejection head which, when applied to a thermal ink jet printer, for example, can reduce parasitic resistance caused by a metallization layer pertaining to a wiring pattern by ensuring a sufficient film thickness of the metallization layer. The wiring pattern (44) is formed by using dry etching in patterning and connected with a heating element (39) through a contact part (41), i.e. an opening, made through an insulating protective layer (40).

公开(公告)号：JPH0972702A

公开(公告)日：1997-03-18

申请号：JP25568995

申请日：1995-09-07

Applicant: SONY CORP

Inventor： TATEISHI OSAMU ,  BABA KENICHI ,  KUBO TAKAAKI

IPC: G01B3/22 ,  G01B5/00 ,  G01B5/06

Abstract: PROBLEM TO BE SOLVED: To make it possible to accurately and rapidly measure the consumption depth of the erosion area of a target at a job site side. SOLUTION: The interval between the fixed leg 504 and the movable leg 505 of a measuring jig 5 is adjusted in accordance with the diameter of a target 1, the legs 504 and 505 are mounted on a backing plate 7, and thereby the jig 5 is supported at three points in the state that the target/is spanned radially with the jig 5. Thereafter, the measuring element 303 of a measuring instrument 3 is inserted from the inserting port 503 corresponding to the position desired to be measured of the erosion region of the target 1 until the lower surface of a gage collar 304 is brought into contact with the upper surface of a support member 501, and the end of the element 303 is pushed in contact with the erosion area desired to be measured, thereby measuring the consumption depth of the erosion area of the target 1.

公开(公告)号：JP2005125638A

公开(公告)日：2005-05-19

申请号：JP2003364395

申请日：2003-10-24

Applicant: Sony Corp ,  ソニー株式会社

Inventor： MIYAMOTO TAKAAKI ,  KONO MINORU ,  TATEISHI OSAMU

IPC: B41J2/05 ,  B41J2/14 ,  B41J2/16

CPC classification number: B41J2/1642 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/13

Abstract: PROBLEM TO BE SOLVED: To prevent deterioration of a heating element even when occurrence of a step is avoided by an SOG film in relation to a liquid jet head, a liquid jet device and a method of manufacturing the liquid jet head, particularly, a thermal type inkjet printer in which a heating element and a transistor for driving the heating element are integrally formed on a substrate.
SOLUTION: A process of depositing a coating type insulation material film and a process of removing the insulation material film in a region for forming the heating element by etching are repeated two or more times.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了防止加热元件的劣化，即使通过SOG膜相对于液体喷射头避免了步骤，液体喷射装置和液体喷射头的制造方法，特别是 ，其中加热元件和用于驱动加热元件的晶体管一体地形成在基板上的热式喷墨打印机。 解决方案：沉积涂覆型绝缘材料膜的过程和通过蚀刻在用于形成加热元件的区域中去除绝缘材料膜的过程重复两次或更多次。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005067163A

公开(公告)日：2005-03-17

申请号：JP2003303853

申请日：2003-08-28

Applicant: Sony Corp ,  ソニー株式会社

Inventor： MIYAMOTO TAKAAKI ,  KONO MINORU ,  TATEISHI OSAMU

IPC: B41J2/05 ,  B41J2/14 ,  B41J2/16 ,  H01L21/822 ,  H01L21/8234 ,  H01L27/04 ,  H01L27/06 ,  H01L27/088

CPC classification number: B41J2/14129 ,  B41J2202/13 ,  B41J2202/21 ,  H01L21/823437 ,  H01L21/823443 ,  H01L27/088

Abstract: PROBLEM TO BE SOLVED: To provide a liquid ejection head, a liquid ejector and a process for manufacturing a liquid ejection head in which parasitic resistance can be decreased as compared with prior art when the invention is applied to a thermal inkjet printer comprising heating elements and transistors for driving the heating elements formed integrally on a substrate.
SOLUTION: The gate electrode of a metal oxide field effect transistor for driving a heating element is formed of a polycide structure or a metal gate structure.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种液体喷射头，液体喷射器和用于制造液体喷射头的方法，其中当本发明应用于热喷墨打印机时，与现有技术相比，可以降低寄生电阻，该热喷墨打印机包括 加热元件和晶体管，用于驱动一体地形成在基板上的加热元件。 解决方案：用于驱动加热元件的金属氧化物场效应晶体管的栅电极由多晶硅结构或金属栅极结构形成。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004276380A

公开(公告)日：2004-10-07

申请号：JP2003070085

申请日：2003-03-14

Applicant: Sony Corp ,  ソニー株式会社

Inventor： MIYAMOTO TAKAAKI ,  TATEISHI OSAMU

IPC: B41J2/16

Abstract: PROBLEM TO BE SOLVED: To form thin films of the same composing materials and different composition ratios such as a heating element and a cavitation resistant layer of a printer head by sputtering using one kind of a target in an application to, for example, an inkjet printer by a thermal system. SOLUTION: The liquid discharging head 11 is configured to eject liquid droplets of a liquid from predetermined nozzles by heating the liquid held in a liquid chamber through driving of a heating element 20. Moreover, the heating element and a protecting layer 26 provided at a face of the heating element side of the liquid chamber to protect the heating element are formed by sputtering using the targets of the same composing materials and the same composition ratio of the composing materials while a distance L to the target is made different. The heating element and the protecting layer 26 are formed of the same composing materials by desired different composition ratios of the composing materials. COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JP2004074603A

公开(公告)日：2004-03-11

申请号：JP2002238728

申请日：2002-08-20

Applicant: Sony Corp ,  ソニー株式会社

Inventor： MIYAMOTO TAKAAKI ,  TATEISHI OSAMU ,  ONO SHOGO ,  KONO MINORU

IPC: B41J2/05 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To effectively avoid deterioration of the reliability by preventing damage of a protecting layer through application of a liquid jet head, a liquid jet device and a manufacturing method for a liquid jet head to, for example, a printer by an ink jet system.
SOLUTION: A stress relaxing layer for relaxing a film stress of a cavitation resistant layer is formed between the protecting layer and the cavitation resistant layer.
COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2003165229A

公开(公告)日：2003-06-10

申请号：JP2001368020

申请日：2001-12-03

Applicant: SONY CORP

Inventor： MIYAMOTO TAKAAKI ,  ONO SHOGO ,  TATEISHI OSAMU ,  SATO TOSHIMITSU

IPC: B41J2/16 ,  B41J2/05 ,  B41J2/14

Abstract: PROBLEM TO BE SOLVED: To effectively avoid reliability deterioration due to damage to a protecting layer by particularly applying a printer head, a printer and a method for manufacturing printer heads to a printer of a system in which ink liquid drops are burst out by heating of heating elements. SOLUTION: A cavitation resistant layer 40 is formed after a heat treatment of stabilizing connection between heating elements 30 and a wiring pattern 33, and the like. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2005001348A

公开(公告)日：2005-01-06

申请号：JP2003170271

申请日：2003-06-16

Applicant: Sony Corp ,  ソニー株式会社

Inventor： IGARASHI KOICHI ,  ONO SHOGO ,  TATEISHI OSAMU

IPC: B41J2/16

Abstract: PROBLEM TO BE SOLVED: To obtain a process for manufacturing a head in which separation of a substrate and a photosensitive resin layer and separation of the photosensitive resin layer and a sheet provided with nozzles can be prevented while applying an existing manufacturing process as it is.
SOLUTION: The process for manufacturing a liquid ejection head comprises a step for forming a photosensitive resin layer 21 on a substrate 14 arranged with energy generating elements, a step for patterning liquid chambers by exposing a part of the photosensitive resin layer 21 and then removing unexposed part, and a step for pasting a sheet provided with nozzles to the expose surface of the photosensitive resin layer 21 remaining on the substrate 14. After the liquid chambers are patterned, at least the exposed surface of the photosensitive resin layer 21 is coated with a protective film 22 and the protective film 22 is separated before the sheet is pasted.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了获得一种头部的制造方法，其中可以防止基片和感光性树脂层的分离，并且可以防止感光性树脂层和设置有喷嘴的片材的分离，同时将现有的制造过程作为 它是。 解决方案：液体喷射头的制造方法包括在布置有能量产生元件的基板14上形成感光性树脂层21的步骤，通过使一部分感光性树脂层21和 然后除去未曝光的部分，以及将设置有喷嘴的片材粘贴到残留在基板14上的感光性树脂层21的露出面的步骤。在对液体室进行图案化之后，感光性树脂层21的露出面至少为 涂覆有保护膜22，并且在粘贴片材之前分离保护膜22。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004299353A

公开(公告)日：2004-10-28

申请号：JP2003097827

申请日：2003-04-01

Applicant: Sony Corp ,  ソニー株式会社

Inventor： TATEISHI OSAMU

IPC: B41J2/05 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To provide an inkjet head having a heating element covered with a protection film superior in a scorching characteristic and a corrosion resistance, and a manufacturing method for the same.
SOLUTION: In the inkjet head for ejecting ink by heating it by means of the heating element, a content of tantalum of a protection layer consisting of coating film containing tantalum applied on the heating element is continuously varied in the depth direction of the protection layer. Particularly, the content of the tantalum is gradually increased toward the surface of the protection layer. In order to vary the content of the tantalum in the tantalum-containing coating film, a distance between a tantalum-containing target and the heating element is varied when spattering using the tantalum-containing target is carried out. Particularly, the protection layer is formed by gradually increasing the distance between the target and the heating element.
COPYRIGHT: (C)2005,JPO&NCIPI