METHOD OF PATTERNING MAGNETIC MEMBERS
    3.
    发明申请
    METHOD OF PATTERNING MAGNETIC MEMBERS 审中-公开
    绘制磁性成员的方法

    公开(公告)号:WO1995013620A1

    公开(公告)日:1995-05-18

    申请号:PCT/US1994002014

    申请日:1994-02-16

    CPC classification number: H01F41/34

    Abstract: A method of patterning magnetic material (24, 26) so as to achieve desired magnetic properties includes providing a metallic substrate (10; 40) having an array of raised islands (12, 14, 16; 38) spaced apart by depressed regions (18) in a pattern to define geometries of magnetic devices (22; 42). In one embodiment, heating of metallic substrate yields magnetic films that possess improved properties with respect to coercive force, anisotrophy field, permeability, and saturation magnetization of both magnetically hard (26) and magnetically soft (24) materials. In another embodiment, a release layer (20) having a low adhesion with respect to attachment to the metallic substrate or a non-metallic substrate is deposited prior to formation of multilayer stacks, thereby reducing the risk of splitting such a stack. In yet another embodiment, the magnetic devices are formed in the depressed regions (46), rather than on the raised islands (48).

    Abstract translation: 一种图案化磁性材料(24,26)以实现期望的磁性能的方法包括提供具有由凹陷区域(18)隔开的凸起岛(12,14,16; 38)阵列的金属基底(10; 40) ),以限定磁性装置(22; 42)的几何形状。 在一个实施例中,金属基底的加热产生磁性膜,其具有相对于磁性硬(26)和磁软(24)材料的矫顽力,各向异性场,磁导率和饱和磁化强度的改善的性能。 在另一个实施方案中,在形成多层堆叠之前,沉积相对于金属基底或非金属基底的附着力低的剥离层(20),从而降低了分裂这种叠层的风险。 在另一个实施例中,磁性器件形成在凹陷区域(46)中,而不是在凸起的岛状物(48)上。

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