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1.发明公开Forming a silicon diaphragm in a cavity by anodizing, oxidizing, and etching or by directly etching the porous silicon 失效通过阳极氧化处理，氧化，和蚀刻或通过多孔硅的直接蚀刻在空腔形成硅膜
公开(公告)号：EP0747686A1
公开(公告)日：1996-12-11
申请号：EP96401129.0
申请日：1996-05-24
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D. , Mattes, Michael F.
CPC classification number: B81C1/00158 , B81B2203/0315 , B81C2201/0115 , B81C2201/0178 , G01L9/0042 , G01L9/0055 , G01P15/0802 , G01P15/123 , Y10S438/96
Abstract: Method of forming a diaphragm (11) supported in a cavity (22), comprising the steps of:
a. implant in a substrate (8) a p-type layer (50);
b. deposit an n-type epitaxial layer (18) on the substrate (8);
c. implant spaced sinkers (58) through the epitaxial layer (18) and into electrical connection with the layer (50);
d. anodize the substrate (8) to form porous silicon of the sinkers (58) and said layer (50);
e. oxidize the porous silicon to form silicon dioxide ; and
f. etch the silicon dioxide to form the cavity (22) and diaphragm (11). A direct etching of porous silicon is also proposed.Abstract translation: 形成包括以下步骤中的腔体（22）支撑的隔膜（11）的方法，包括：一个。 在衬底中注入层（8）的p型（50）; 湾 在n型外延层（18）的存款衬底（8）; 温度。 植入物隔开沉降片（58）穿过所述外延层（18）和与所述层（50）电连接; 天。 阳极氧化基片（8），以形成沉降片的多孔硅（58）和所述层（50）; 即 氧化多孔硅以形成二氧化硅; 和f。 蚀刻二氧化硅以形成空腔（22）和隔膜（11）。 因此多孔硅的直接蚀刻提议。
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2.发明公开Apparatus for detecting the speed of a rotating element 失效Vorrichtung zur Ermittlung der Geschwindigkeit eines rotierenden Elements
公开(公告)号：EP0806673A2
公开(公告)日：1997-11-12
申请号：EP97400780.9
申请日：1997-04-04
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D.
Abstract: A sensor for determining the rotational speed of a rotating element. The sensor includes a giant magnetoresistive ratio sensing device which is magnetically coupled to the rotating element and includes an output terminal. The sensing device generates an output signal at the output terminal having a frequency corresponding to the rotational speed of the rotating element. A wave-shaping circuit is connected to the output terminal for receiving the output signal and for generating a digital switching signal having a frequency equal to the frequency of the output signal. A frequency divider has an input connected to the wave shaping circuit for receiving the digital switching signal. The frequency divider generates, in response to the digital switching signal, a square wave output having a 50% duty cycle and a frequency equal to the frequency of the digital switching signal divided by a predetermined divisor.
Abstract translation: 用于确定旋转元件的旋转速度的传感器。 传感器包括磁耦合到旋转元件并包括输出端的巨磁阻比传感装置。 感测装置在输出端产生具有与旋转元件的旋转速度对应的频率的输出信号。 波形整形电路连接到输出端子，用于接收输出信号并产生频率等于输出信号频率的数字切换信号。 分频器具有连接到波形整形电路的输入端，用于接收数字切换信号。 分频器响应于数字切换信号产生具有50％占空比的方波输出和等于数字开关信号的频率除以预定除数的频率。
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公开(公告)号：EP0805349A3
公开(公告)日：1999-08-04
申请号：EP97400717.1
申请日：1997-03-28
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D. , Mattes, Michael F.
IPC: G01N27/12
CPC classification number: G01N33/0062 , G01L19/12
Abstract: A gas concentration sensor for use in a closed container having a constant volume and gas within the container, wherein the gas has a known pressure at a given temperature. The sensor includes a pressure sensing device disposed within the container, wherein the pressure sensing device generates a first electrical signal functionally related to the gas pressure within the container. The sensor also includes an electronic circuit connected to the pressure sensing device which amplifies the first electrical signal and produces a second electrical signal functionally related to the gas concentration within the volume at any temperature.
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公开(公告)号：EP0721106A3
公开(公告)日：1996-07-31
申请号：EP95402827.0
申请日：1995-12-15
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D. , Ausavich, Timothy C. , Bloom, Jeffrey J.
Abstract: A bearing assembly for a vehicle including a fixed element, a rotating element rotating relative to the fixed element about an axis, and an annular sensor connected to one of the fixed element and the rotating element. The sensor includes a pick-up coil and an annular magnet connected to the pick-up coil. The magnet has a plurality of magnetic regions which alternate in polarity around the magnet. The magnet generates a magnetic flux path magnetically coupling the magnet to the coil and resulting in the generation of an electrical signal in the coil. The rotating bearing element includes a plurality of gear teeth. The gear teeth generate a change in the reluctance of the magnetic flux path to vary the electrical signal in response to the angular speed of the fixed element relative to the rotating element.
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公开(公告)号：EP0825427A2
公开(公告)日：1998-02-25
申请号：EP97113020.8
申请日：1997-07-29
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D. , Mattes, Michael F.
IPC: G01L9/00
CPC classification number: G01L9/0042 , G01L1/183 , G01L9/0019 , G01L9/0055 , G01P15/0802 , G01P15/123
Abstract: A force transducer having a semiconductor substrate including a surface defining a recess, such that the recess has a peripheral boundary and a flexible diaphragm connected to the surface along the peripheral boundary to enclose the recess so that the diaphragm moves in response to changes in a force applied thereto. The force transducer also includes a resonant beam connected to the surface adjacent the peripheral boundary. The resonant beam has a frequency of resonation. Movement of the diaphragm in response to changes in the force applied to the diaphragm changes the frequency of resonation of the resonant beam.
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Patent Agency Ranking
公开(公告)号：EP0721106A2
公开(公告)日：1996-07-10
申请号：EP95402827.0
申请日：1995-12-15
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D. , Ausavich, Timothy C. , Bloom, Jeffrey J.
Abstract: A bearing assembly for a vehicle including a fixed element, a rotating element rotating relative to the fixed element about an axis, and an annular sensor connected to one of the fixed element and the rotating element. The sensor includes a pick-up coil and an annular magnet connected to the pick-up coil. The magnet has a plurality of magnetic regions which alternate in polarity around the magnet. The magnet generates a magnetic flux path magnetically coupling the magnet to the coil and resulting in the generation of an electrical signal in the coil. The rotating bearing element includes a plurality of gear teeth. The gear teeth generate a change in the reluctance of the magnetic flux path to vary the electrical signal in response to the angular speed of the fixed element relative to the rotating element.
Abstract translation: 一种用于车辆的轴承组件，其包括固定元件，相对于固定元件围绕轴线旋转的旋转元件以及连接到固定元件和旋转元件中的一个的环形传感器。 该传感器包括拾取线圈和连接至拾取线圈的环形磁体。 磁体具有多个围绕磁体极性交替的磁性区域。 磁体产生将磁体磁耦合到线圈的磁通量路径，并导致在线圈中产生电信号。 旋转轴承元件包括多个齿轮齿。 齿轮齿产生磁通路径的磁阻的变化，以响应于固定元件相对于旋转元件的角速度而改变电信号。
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公开(公告)号：EP0721106B1
公开(公告)日：2000-03-08
申请号：EP95402827.0
申请日：1995-12-15
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D. , Ausavich, Timothy C. , Bloom, Jeffrey J.
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8.发明公开Resonating structure and method for forming the resonating structure 失效Resonanzstruktur und Verfahren zur Bildung der Resonanzstruktur
公开(公告)号：EP0825427A3
公开(公告)日：2000-01-12
申请号：EP97113020.8
申请日：1997-07-29
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D. , Mattes, Michael F.
CPC classification number: G01L9/0042 , G01L1/183 , G01L9/0019 , G01L9/0055 , G01P15/0802 , G01P15/123
Abstract: A force transducer (10) having a semiconductor substrate (14) including a surface (18) defining a recess (22), such that the recess (22) has a peripheral boundary and a flexible diaphragm (86,90) connected to the surface along the peripheral boundary to enclose the recess so that the diaphragm (86,90) moves in response to changes in a force applied thereto. The force transducer also includes a resonant beam (62) connected to the surface adjacent the peripheral boundary. The resonant beam has a frequency of resonation. Movement of the diaphragm in response to changes in the force applied to the diaphragm changes the frequency of resonation of the resonant beam (62).
Abstract translation: 一种力传感器，其具有包括限定凹部的表面的半导体衬底，使得所述凹部具有周边边界和沿周边边界连接到所述表面的柔性隔膜以包围所述凹部，使得所述隔膜响应于力的变化而移动 应用于此。 力传感器还包括连接到邻近外围边界的表面的谐振束。 谐振光束具有谐振频率。 响应于施加到隔膜的力的变化，隔膜的移动改变了谐振波束的谐振频率。
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9.发明授权Forming a silicon diaphragm in a cavity by anodizing, oxidizing, and etching 失效在通过阳极氧化处理，氧化和蚀刻的空腔形成硅膜
公开(公告)号：EP0747686B1
公开(公告)日：1999-04-14
申请号：EP96401129.0
申请日：1996-05-24
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D. , Mattes, Michael F.
CPC classification number: B81C1/00158 , B81B2203/0315 , B81C2201/0115 , B81C2201/0178 , G01L9/0042 , G01L9/0055 , G01P15/0802 , G01P15/123 , Y10S438/96
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公开(公告)号：EP0805349A2
公开(公告)日：1997-11-05
申请号：EP97400717.1
申请日：1997-03-28
Applicant: SSI TECHNOLOGIES, INC.
Inventor： Seefeldt, James D. , Mattes, Michael F.
IPC: G01N27/12
CPC classification number: G01N33/0062 , G01L19/12
Abstract: A gas concentration sensor for use in a closed container having a constant volume and gas within the container, wherein the gas has a known pressure at a given temperature. The sensor includes a pressure sensing device disposed within the container, wherein the pressure sensing device generates a first electrical signal functionally related to the gas pressure within the container. The sensor also includes an electronic circuit connected to the pressure sensing device which amplifies the first electrical signal and produces a second electrical signal functionally related to the gas concentration within the volume at any temperature.
Abstract translation: 一种气体浓度传感器，用于在容器内具有恒定体积和气体的密闭容器中，其中气体在给定温度下具有已知的压力。 传感器包括设置在容器内的压力感测装置，其中压力感测装置产生与容器内的气体压力功能相关的第一电信号。 传感器还包括连接到压力感测装置的电子电路，其放大第一电信号并且产生与任何温度下的体积内的气体浓度功能相关的第二电信号。
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