公开(公告)号：SG144848A1

公开(公告)日：2008-08-28

申请号：SG2008004566

申请日：2008-01-17

Applicant: ST MICROELECTRONICS ASIA

Inventor： WANG SHANZHONG CHARLES ,  NAI BRENDA ,  MIAO ZHONGLIN

Abstract: CNT DEVICES, LOW-TEMPERATURE FABRICATION OF CTN AND CNT PHOTO-RESISTS A method is provided for growth of carbon nanotube (CNT) synthesis at a low temperature. The method includes preparing a catalyst by placing the catalyst between two metal layers of high chemical potential on a substrate, depositing such placed catalyst on a surface of a wafer, and reactivating the catalyst in a high vacuum at a room temperature in a catalyst preparation chamber to prevent a deactivation of the catalyst. The method also includes growing carbon nanotubes on the substrate in the high vacuum in a CNT growth chamber after preparing the catalyst. FIG. 1-1