公开(公告)号：BG104182A

公开(公告)日：2001-09-28

申请号：BG10418200

申请日：2000-02-23

Applicant: STAVROV VLADIMIR T

Inventor： STAVROV VLADIMIR T

IPC: G01L23/10 ,  G01R9/08

Abstract: The semiconductor micromechanical piezoresistive detector with biomorphic actuator is an instrument in which four elements are integrated: micromechanical beam, two-layer actuator with a heater, semiconductor piezoresistive detector and a sensitive element. The instrument can measure different environmental parameters depending on the type of the sensitive element by registering the changes in the resonance frequency of the micromechanical beam. The generation of the mechanical oscillations and the registration of the frequency of the mechanical resonance is made by the admission of AC current across the heater of the biomorphic actuator. 1 claim, 2 figures