公开(公告)号：WO2019217330A1

公开(公告)日：2019-11-14

申请号：PCT/US2019/030943

申请日：2019-05-06

Applicant: STC. UNM

Inventor： BRUECK, Steven, R.J. ,  FARIA BRICENO, Juan, Jose ,  ZHU, Ruichao

IPC: G01N21/55

Abstract: A system for measuring a periodic array of structures on a sample is provided. The system includes an optical source configured to produce an optical beam; an optical system configured to control the polarization of the optical beam and to focus the optical beam with a first NA 1 on a sample surface and to sweep the angle of incidence across a range of angles with an approximately fixed focal position on a sample surface with a second NA 2 wherein NA 2 > NA 1 ; additional optical components configured to receive the optical beam reflected from the sample surface and to focus the reflected beam onto a detector; and a recording system to record the reflectivity of the sample surface as a function of the angle of incidence.