公开(公告)号：AU2003286888A8

公开(公告)日：2004-06-03

申请号：AU2003286888

申请日：2003-11-05

Applicant: STEVENS INSTITUTE OF TECHNOLOGY

Inventor： KUNHARDT ERICH ,  BECKER KURT

IPC: H01J20060101 ,  H01J7/24 ,  H01J17/00 ,  H01J17/04 ,  H01J37/32 ,  H01J61/28 ,  H05H1/24 ,  H05H1/46 ,  H01J17/49

Abstract: A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate having an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode. Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshold for the glow-to-arc transition. This allows for a stable glow discharge to be maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields of varying strength.