公开(公告)号：NL1001059C2

公开(公告)日：1997-02-27

申请号：NL1001059

申请日：1995-08-25

Applicant: STICHTING FUND OND MATERIAL

Inventor： VEEN FRISO JOHANNES VAN DER ,  HAAS EVERT DE

IPC: H01L41/09 ,  H02N2/10 ,  H02N2/12

Abstract: The sample holder is mounted in the centre or the rotor disc. On each side of the disc are triangular actuation supports. The triangular supports are attached by screws to the frame of the machine. Leaf springs form the edges of the supports. At the triangle peaks are piezo electric elements. Currents fed to the piezo elements cause the rotor to move by small angles. The motor can move the disc through angle steps of less than 0.001 degrees, at a rotation rate of two revolutions per minute. The motor can operate in a vacuum of 10 to the minus 10 Torr and at temperatures of up to 150 degrees C.