公开(公告)号：NL2012967B1

公开(公告)日：2016-06-27

申请号：NL2012967

申请日：2014-06-06

Applicant: STICHTING VU-VUMC ,  FOM-NIKHEF

Inventor： ERIC HENNES ,  ALESSANDRO BERTOLINI ,  JOHANNES FRANCISCUS JOSEPHINA VAN DEN BRAND

IPC: B81B7/00 ,  B81B3/00

Abstract: A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to said support structure; and, a proof mass flexibly suspended by said suspension springs; wherein at least one of said suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.