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1.发明专利
公开(公告)号：FR3009430B1
公开(公告)日：2016-10-28
申请号：FR1357766
申请日：2013-08-05
Applicant: STMICROELECTRONICS (ROUSSET) SAS
Inventor： GOASDUFF YOANN , MARZAKI ABDERREZAK
IPC: H01L21/82 , H01L21/30 , H01L21/71 , H01L27/10 , H01L29/732
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