公开(公告)号：US12284480B2

公开(公告)日：2025-04-22

申请号：US18066148

申请日：2022-12-14

Applicant: STMicroelectronics International N.V.

Inventor： Domenico Giusti ,  Fabio Quaglia ,  Marco Ferrera ,  Carlo Luigi Prelini

IPC: H04R17/00

Abstract: The present disclosure is directed to transducer assemblies or device in which one or more buried cavities are present within a substrate and define or form one or more membranes along a surface of the substrate. One or more piezoelectric actuators are formed on the one or more membranes and the one or more piezoelectric actuators drive the membranes at an operating frequency with an operating bandwidth of the transducer assemblies. Each of the one or more membranes is anchored at respective portions to a main body portion of the substrate to provide robust and strong anchoring of each of the one or more membranes to push unwanted flexure modes outside the operating bandwidth of the transducer assemblies.