公开(公告)号：EP4502536A1

公开(公告)日：2025-02-05

申请号：EP24192288.9

申请日：2024-08-01

Applicant: STMicroelectronics International N.V.

Inventor： RIANI, Manuel ,  VALZASINA, Carlo ,  YALLICO SANCHEZ, Gianfranco Javier ,  GUERINONI, Luca

IPC: G01C19/5712 ,  G01C19/5733 ,  B81B3/00 ,  G01P15/097 ,  B81C1/00 ,  H03H9/02 ,  G01P15/08

Abstract: A MEMS (MicroElectroMechanical System) device includes: a supporting body (10); a movable mass (11), constrained to the supporting body (10) by flexures (12; 512) so as to be able to oscillate in a main direction (X); an actuator device (8, 18), configured to apply to the movable mass (11) an electrostatic actuation force (F A ), transverse to the main direction (X); and a control circuit (9) configured to detect stiction conditions, in which the movable mass (11) is stuck to the supporting body (10) by a stiction force (F S ), and for driving the actuator device (8, 18) in response to recognition of the stiction conditions. The actuation force (F A ) is an oscillating variable force with an actuation frequency band (ΔF A ) containing at least one resonance frequency (F R ), in an actuation direction transverse to the main direction (X), of a mechanical system comprising the movable mass (11) stuck to the supporting body (10), so that the actuation force (F A ) will activate at least one natural vibrational mode in a vibration direction transverse to the main direction (X).