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1.Semiconductor device incorporating a contact and manufacture thereof 失效
Title translation: 具有用于其制备的接触和工艺的半导体器件公开(公告)号:EP0587399B1
公开(公告)日:2002-07-24
申请号:EP93307034.4
申请日:1993-09-07
Applicant: STMicroelectronics Limited
Inventor: Nicholls, Howard Charles , Norrington, Michael John
IPC: H01L23/48 , H01L21/283
CPC classification number: H01L21/76877 , H01L21/76838 , H01L21/76895 , H01L23/485 , H01L2924/0002 , Y10S257/90 , H01L2924/00