DRIVING MULTIPLE RESONANCE MEMS MIRRORS WITH A SINGLE FREQUENCY

    公开(公告)号:EP3779558A1

    公开(公告)日:2021-02-17

    申请号:EP20188304.8

    申请日:2020-07-29

    Abstract: A control circuit includes a first control circuit (14a) generating a first drive control signal (24a) from a pre-drive signal (21), which is a frequency at which an opening angle of first and second mirrors (11a,11b) is equal, for the first mirror (11a). A second control circuit (14b) generates a second drive control signal (24b) from the pre-drive signal (21) for the second mirror (11b). First and second drivers (13a,13b) generate first and second drive signals (22a,22b) for the first and second mirrors (11a,11b) from the first and second drive control signals (24a,24b). The first and second drive control signals (22a,22b) are generated so that the first and second drive signals (22a,22b) each have a same frequency as the pre-drive signal (21) but are different in amplitude from one another to cause the first and second mirrors (11a,11b) to move at a same frequency, with a same and substantially constant given opening angle as one another, and in phase with one another.

    LASER RANGING SYSTEM UTILIZING SENSOR IN SAME OPTICAL PATH AS EMITTING LASER

    公开(公告)号:EP3591425A1

    公开(公告)日:2020-01-08

    申请号:EP19183652.7

    申请日:2019-07-01

    Abstract: A laser ranging system (5) includes a light source (32, 34) emitting a beam (31) of collimated light. A beam splitter (12) polarizes the beam with a first type of linear polarization. A wave plate (14) receives the beam from the beam splitter (12) and polarizes the beam with a circular polarization. A movable mirror (16) scans the beam across a target (22), receives a return beam (17) from the target, and reflects the return beam toward the wave plate (14). The wave plate polarizes the return beam with a second type of linear polarization. The beam splitter (12) receives the return beam (23) from the wave plate (14). A detector (20) detects arrival of the return beam from the beam splitter (12). A circuit (18) determines a distance to the target as a function of a time interval between emission of the beam (31) of collimated light and arrival of the return beam (23).

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