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公开(公告)号：US20210214211A1
公开(公告)日：2021-07-15
申请号：US17115137
申请日：2020-12-08
Applicant: STMicroelectronics Pte Ltd
Inventor： Ravi Shankar , Tien Choy Loh , Ananya Venkatesan
Abstract: A blind opening is formed in a bottom surface of a semiconductor substrate to define a thin membrane suspended from a substrate frame. The thin membrane has a topside surface and a bottomside surface. A stress structure is mounted to one of the topside surface or bottomside surface of the thin membrane. The stress structure induces a bending of the thin membrane which defines a normal state for the thin membrane. Piezoresistors are supported by the thin membrane. In response to an applied pressure, the thin membrane is bent away from the normal state and a change in resistance of the piezoresistors is indicative of the applied pressure.
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