公开(公告)号：EP1832841A1

公开(公告)日：2007-09-12

申请号：EP06425163.0

申请日：2006-03-10

Applicant: STMicroelectronics S.r.l.

Inventor： Spinola Durante, Guido ,  Balzelli Ludovico, Alessandro ,  Zerbini, Sarah

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: A driving mass (3) of an integrated microelectromechanical structure (1) is moved with a rotary motion about an axis of rotation (z), and a first sensing mass (16a) is connected to the driving mass (3) via elastic supporting elements (20) so as to perform a first detection movement in the presence or a first external stress. The driving mass (3) is anchored to an anchorage (7) arranged along the axis of rotation by elastic anchorage elements (8); an opening (9a) is provided within the driving mass, and the first sensing mass (16a) is arranged within the opening. The elastic supporting and anchorage elements render the first sensing mass (16a) fixed to the driving mass (3) in the rotary driving motion, and substantially decoupled from the driving mass in the detection movement.

Abstract translation: 集成的微机电结构（1）的驱动块（3）以围绕旋转轴线（z）的旋转运动移动，并且第一感测质量块（16a）经由弹性支撑元件 （20），以便在存在或第一外部应力的情况下执行第一检测运动。 驱动质量块（3）被锚固到通过弹性锚固元件（8）沿旋转轴线布置的锚固件（7）; 在驱动质量块内设有开口（9a），第一传感块（16a）设置在开口内。 弹性支撑和锚固元件使得第一感测质量块（16a）在旋转驱动运动中固定到驱动质量块（3），并且在检测运动中基本上与驱动质量块分离。