公开(公告)号：EP4322410A1

公开(公告)日：2024-02-14

申请号：EP23188080.8

申请日：2023-07-27

Applicant: STMicroelectronics S.r.l.

Inventor： VERCESI, Federico ,  GATTERE, Gabriele ,  ALLEGATO, Giorgio ,  AZPEITIA URQUIA, Mikel ,  DANEI, Alessandro

IPC: H03K17/975

Abstract: A microelectromechanical button device (5) is provided with a detection structure (14) having: a substrate (22) of semiconductor material with a front surface (22a) and a rear surface (22b); a buried electrode (28) arranged on the substrate; a mobile electrode (32), arranged in a structural layer (30) overlying the substrate and elastically suspended above the buried electrode at a separation distance so as to form a detection capacitor (Cd); and a cap (46) coupled over the structural layer and having a first main surface (46a) facing the structural layer and a second main surface (46b) that is designed to be mechanically coupled to a deformable portion (3) of a case (2) of an electronic apparatus (1) of a portable or wearable type. The cap has, on its first main surface, an actuation portion (48) arranged over the mobile electrode and configured to cause, in the presence of a pressure applied on the second main surface, a deflection of the mobile electrode and its approach to the buried electrode, with a consequent capacitive variation of the detection capacitor, which is indicative of an actuation of the microelectromechanical button device.