公开(公告)号：EP3279609A1

公开(公告)日：2018-02-07

申请号：EP17162588.2

申请日：2017-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： PRATI, Daniele ,  VALZASINA, Carlo ,  CHIARILLO, Tiziano ,  FRANCO, Pasquale

IPC: G01C19/574

Abstract: A MEMS gyroscope (60, 100), wherein a suspended mass (111-114) is mobile with respect to a supporting structure (125, 127). The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure (77) is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes (130), coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes (121-124) are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.

Abstract translation: 一种MEMS陀螺仪（60,100），其中悬置物（111-114）相对于支撑结构（125,127）是可移动的。 移动质量受到正交矩引起的正交误差的影响; 驱动结构（77）联接到悬挂质量体，用于以驱动频率控制移动质量块在驱动方向上的移动。 耦合到移动物体的运动感测电极（130）检测移动物体在感测方向上的移动，并且正交补偿电极（121-124）耦合到移动物体以产生与正交 时刻。 陀螺仪被配置为用补偿电压偏置正交补偿电极，使得移动质量的谐振频率与驱动频率之间的差值具有预设的频率失配值。

公开(公告)号：EP3279609B1

公开(公告)日：2020-11-04

申请号：EP17162588.2

申请日：2017-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： PRATI, Daniele ,  VALZASINA, Carlo ,  CHIARILLO, Tiziano ,  FRANCO, Pasquale

IPC: G01C19/574